Measuring device and method for free-form surface based on metallic silver enhanced fluorescence
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A technology for enhancing fluorescence and measuring devices, applied in measuring devices, adopting optical devices, instruments, etc., can solve the problems of uneven fluorescent interlayer and large surface height error, so as to reduce measurement cost, small surface height error, The effect of simple light path
Inactive Publication Date: 2019-03-29
HARBIN INST OF TECH
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[0006] The purpose of the present invention is to solve the problem of large surface height error due to the inhomogeneity of the fluorescent intermediary layer on the surface of the sample, and to provide a free-form surface measurement device and its measurement method based on metallic silver enhanced fluorescence
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specific Embodiment approach 1
[0018] Specific implementation mode one: the following combination figure 1 Describe this embodiment, the free-form surface measurement device based on metallic silver enhanced fluorescence described in this embodiment, the measurement device includes an illumination module, a detection module and a sample module;
[0019] According to the propagation direction of the illumination light, the illumination module is as follows: laser 1, collimator 2, aperture 3, polarization beam splitter prism 4, scanning galvanometer 5 and scanning lens 6;
[0020] According to the signal light propagation direction, the detection module is as follows: scanning lens 6, scanning galvanometer 5, polarization beam splitter prism 4, optical filter 9, collecting lens 10, pinhole 11 and photodetector 12;
[0021] The sample module includes a sample to be tested 7 and a three-dimensional micro-displacement stage 8 for placing the sample to be tested 7;
[0022] The surface of the sample to be tested...
specific Embodiment approach 2
[0024] Specific implementation mode two: the following combination figure 1 This embodiment will be described. This embodiment will further describe the first embodiment. The scan lens 6 is used as an illumination and imaging lens, and has a field of view of 50 mm×50 mm.
specific Embodiment approach 3
[0025] Specific implementation mode three: the following combination figure 1 This embodiment will be described. This embodiment will further describe Embodiment 1. The wavelength of the laser beam emitted by the laser 1 is 532nm, and the optical power of the illumination light after passing through the scanning lens 6 is less than 1w.
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Abstract
Disclosed is a free-form curved surface measurement apparatus based on silver-enhanced fluorescence, comprising an illumination module, a detection module and a sample module; the illumination module, according to the propagation direction of illumination light, successively includes: a laser (1), a collimating lens (2), a diaphragm (3), a polarising light-splitting prism (4), a scanning galvanometer (5) and a scanning lens (6); the detection module, according to the propagation direction of signal light, successively includes: a scanning lens (6), a scanning galvanometer (5), a polarising light-splitting prism (4), an optical filter sheet (9), a collecting lens (10), a pin hole (11) and a photoelectric detector (12); the sample module comprises a sample to be measured (7) and a three-dimensional micro-digit objective table (8) used for placing the sample to be measured (7); and the surface of the sample to be measured (7) is plated with a metal fluorescence thin film. The apparatus can solve the problem of large surface shape height errors due to lack of uniformity in a fluorescent dielectric layer on the sample surface.
Description
technical field [0001] The invention relates to a free-form surface measuring device based on metallic silver enhanced fluorescence and a measuring method thereof, belonging to the technical field of optical precision measurement. Background technique [0002] When using a large-aperture free-form surface sample measurement device, a layer of weakly attached nanometer-thick fluorescent medium is deposited on the sample surface by using physical vapor deposition technology to construct an isotropic fluorescent scattering surface, and then collect the light emitted by the thin film on the sample surface. The axial envelope curve is obtained by fluorescence, and the surface morphology of the sample can be obtained through image processing. [0003] However, when calculating the z-axis height of the scanning point, a confocal axial response peak position shift will be introduced due to the film thickness. In practice, due to the inhomogeneity of the fluorescent intermediary lay...
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