An integrated biosensor and its preparation method

Abstract

The invention discloses an integrated biosensor and a preparation method thereof, wherein an incident waveguide is arranged on the input end of a body, the input end of a waver filter is positioned on the input end of the body, the output end of the wave filter is positioned on the output end of the body, a thermal tuning micro ring is arranged on the output end of the wave filter, the input end of a power splitter is positioned on the download end of the thermal tuning micro ring, a sensing micro ring is arranged on the other output end of the power splitter, a germanium-silicon detector is arranged on the output port of the download end of the sensing micro ring, a heating electrode is arranged on the thermal tuning micro ring, and the sensing micro ring is positioned in a sensing window. According to the present invention, the photodetector and the sensing passive device are monolithically integrated so as to easily perform the array sensing; the input light source is the broad spectrum light source, and the external optical power meter is not required, such that the loss and the complexity of the system are reduced; and the expensive tunable laser and the high-precision spectrometer are not required so as to substantially reduce the whole system cost.

Description

technical field [0001] The invention relates to a microelectronic biosensor, in particular to an integrated biosensor and a preparation method thereof. Background technique [0002] As a traditional microelectronic material, silicon material has been widely used in the CMOS field, and silicon material has a very low loss coefficient in the communication band, and is a good waveguide material. In recent years, silicon photonics has gradually become a hot topic. In the field of research, great breakthroughs have been made in photoelectric modulators, splitters and various active and passive devices. At the same time, researchers are gradually applying silicon photonics to various sensing fields, including biological, environmental, chemical detection, Due to the compatibility of silicon with CMOS and high refractive index, researchers have developed integrated optical sensors based on various structures, including Mach-Zehnder interferometers, surface plasmons, and microcaviti...

AI Technical Summary

Problems solved by technology

For a microring resonator, when the concentration of the target substance to be measured changes, the effective refractive index of the microring waveguide changes, resulting in a certain change in the resonance peak of the microring. A single microring based on biosensing, using a common Micro-ring structure and groove waveguide structure, the detection limit is from 10-4 to 10-7. In general, the two basic detection methods for optical sensing are wavelength scanning and intensity scanning. However, for the wavelength scanning method, for The normal way to measure the shift of the resonance peak is to combine photodetectors and high-precision tunable lasers, or to use broadband light sources and spectrometer (OSA) analysis systems. However, these devices are usually relatively expensive and not suitable for low-cost systems. application, and for OSA or tunable laser, the detection sensitivity is limited by the detection accuracy of OSA and tunable laser; and for intensity scanning, set a wavelength, when the resonance peak drifts, the output light intensity will change, However, due to the small width of the resonance peak, the response power quickly approaches zero as the refractive index changes, so the measurement range is limited

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