Flexible pressure sensor based on carbon nanotube film and photoresist and preparation method thereof

Abstract

The invention discloses a flexible pressure sensor based on a carbon nanotube film and photoresist. The sensor adopts a sandwich structure; the carbon nanotube film and a transparent flexible substrate are combined to form a self-supported carbon nanotube film electrode layer; and a photoresist thin layer with a micropore structure is sandwiched between two carbon nanotube film electrode layers. The preparation method of the flexible pressure sensor comprises the steps of: firstly, transferring the carbon nanotube film onto the flexible substrate to form a carbon nanotube film flexible electrode; then carrying out photoetching on the flexible electrode, and covering the electrode with a porous photoresist insulating layer; and finally, then covering the porous photoresist insulating layer with one layer of same carbon nanotube film flexible electrode. According to the pressure sensor disclosed by the invention, by utilizing the property that a contact resistance is rapidly changed along with a contact area, one high-flexibility, low-power-consumption, transparent and ultrathin pressure sensor is implemented; and meanwhile, the flexible pressure sensor also has the advantages of high response speed, high spatial resolution, easiness for integration, low cost and the like.

Description

technical field [0001] The invention relates to a pressure sensor, which belongs to the technical field of flexible electronic devices, in particular to a flexible pressure sensor based on carbon nanotube film and photoresist. Background technique [0002] With the rapid development of wearable smart devices such as Google glasses, smart bracelet watches and smart running shoes, flexible electronic devices, especially flexible artificial electronic skins, have become one of the hotspots of academic research in recent years. Artificial electronic skin, also known as smart skin, artificial skin and electronic skin, can imitate the function of human skin and detect signals such as temperature, humidity and mechanical stimulation of the environment. It can be widely used in artificial intelligence, health monitoring, touch screen and wearable devices and other fields. [0003] One of the most important functions of electronic skin is to detect pressure signals, by measuring the...

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Problems solved by technology

[0004] At present, most resistive sensors use composite materials composed of conductive nanomaterials and flexible polymers as the response medium (Si Y, Wang X, Yan C, et al. Ultralight Biomass-Derived Carbonaceous Nanofibrous Aerogels with Superelasticity and High Pressure-Sensitivity[J] .Advanced Materials, 2016,28(43):9512.), its response speed is slow and the relaxation time is long

At the same time, it is difficult to make such a three-dimensional structure into a pressure sensor thin film for application in fields such as electronic skin. In addition, the manufacturing process of this type of sensor is complicated and the cost is high, which is not conducive to integration and mass production.

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