A non-contact graphite boat

Abstract

The invention discloses a graphite boat without a contact insertion sheet. The graphite boat comprises insulation rods and unit boat sheets, wherein the unit boat sheets are arranged in a horizontal direction and are sheet-shaped bodies arranged vertically, a gap exists between adjacent unit boat sheets, the insulation rods penetrate through circumferential edges of the unit boat sheets to make all unit boat sheets connected together, grooves are formed in inner surfaces and outer surfaces of the unit boat sheets arranged at two outer sides, small holes are formed in bottom surfaces of the groove and penetrate through the grooves, through holes are formed in middle unit boat sheets, clamping points are arranged at peripheries of the grooves and the through holes, silicon wafers are attached onto the grooves and the through holes and are fixed by the clamping points, circumferential edges of the silicon wafers are covered on surrounding regions of the grooves and the through holes, blowholes are formed in the surrounding regions, and a protection gas sprayed from the blowholes is used for applying a push force onto the silicon wafers so that the silicon wafers are not in contact with the unit boat sheets to prevent friction between the silicon wafers and the unit boat sheets during insertion. By the graphite boat, scratches can be prevented from being generated on surfaces of the silicon wafers, non-uniform coating is also avoided, and the appearance qualified rate and the photoelectric conversion efficiency of a solar cell are improved.

Description

technical field [0001] The invention relates to a graphite boat, in particular to a non-contact inserted graphite boat. Background technique [0002] The manufacture of solar cells needs to go through six major processes: texturing, diffusion, etching, coating, screen printing and sintering. Among them, the coating process is to use the method of plasma enhanced chemical vapor deposition to coat silicon nitride film on the front of the silicon wafer to reduce sunlight reflection and passivate the surface of the silicon wafer. When the surface coating process of silicon wafers is performed, it is necessary to insert the uncoated silicon wafers into the wafer carrier of the PECVD vacuum coating equipment. At present, the wafer carrier usually uses a graphite boat. Graphite boat or insert the silicon wafer into a special graphite boat through an automatic loading and unloading machine. The specific operation process is: insert the silicon wafer into the graphite boat and posit...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a non-contact plug-in graphite boat that can improve the yield of battery appearance and photoelectric conversion efficiency, and solve the technical problems of silicon chip scratches and uneven coating that exist in traditional coated graphite boats

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