A kind of polishing equipment and polishing method of precision thin-walled parts

Abstract

The invention discloses polishing equipment of precision thin-walled parts and a polishing method of the equipment. The parts are polished by sequentially arranging a mechanical polishing mechanism, an electrolytic polishing mechanism and a computer numerical control mechanism, and the effect that the surfaces of the polished parts has good flatness is ensured through the gradually detailed polishing procedures. Polishing abrasive cloth arranged under a sliding block of the mechanism polishing mechanism is of a detachable structure, and thus replacement and adjustment can be facilitated. A certain voltage is maintained between an acid-resisting metal spray pipe and the to-be-polished parts by an electrolytic polishing device, and fine burrs and surface oxide skins on the thin-walled precision parts can be evenly removed through quite low current. In addition, a grinding head is controlled by the numerical control polishing mechanism through a numerical control program to move on the surfaces of the parts according to corresponding tracks, a pressure sensor is mounted between a rotary spindle and a spindle clamp, and thus a proper pressure value can be kept between the grinding head and the parts in real time, polishing can be conducted smoothly, and the parts are not deformed.

Description

technical field [0001] The invention relates to the field of polishing equipment and polishing technology, in particular to a polishing equipment for precision thin-walled parts and a polishing method thereof. Background technique [0002] In vacuum coating equipment, the ion source grid is an important component that generates high-energy ion beams, and these components work under high voltage and high temperature conditions. Its surface does not allow any microscopic burrs, nor does it allow slight deformation, otherwise it will cause major accidents due to tip discharge. [0003] For precision parts such as ion source grids, in the final stage of processing, good surface treatment can reduce product wear and improve customer satisfaction. It is also an indispensable and important step, especially for some For metal parts in high-voltage environments, the ability to have a bright surface quality can greatly reduce sparking failures caused by tip discharges. [0004] Poli...

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Problems solved by technology

[0005] At present, in the process of manual polishing of grid parts, if due to the lack of experience of workers, it is easy to cause some adverse consequences, such as: (1) The pressure applied to the part by the grinding tool exceeds the critical point of deformation, which will cause the part to deform; (2) ) The pressure and grinding speed of the grinding head at each position are inconsistent, resulting in mottled spots on the surface of the part; (3) The grinding head stays in a local part of the part for too long, which may easily cause the surface of the part to overheat and burn, or overcut to affect the size; (4) Grinding The head is easy to jump at the boundary of the part, resulting in unstable handholding, which gives the product a severe impact, resulting in waste and tool damage; (5) When manual polishing fixes batch products, there is a high possibility that the characteristics of the product will be inconsistent; (6) Electrolytic polishing When all parts are immersed in the electrolyte, the required current is too large, reaching tens of amperes per square centimeter. The requirements for power supply and fixtures are relatively high, and the corresponding requirements for equipment investment are also relatively large; (7) in The contact position between the fixture and the part is easy to affect the effect due to the occlusion of the fixture, and it is also easy to cause ablation due to too much current at the contact point; (8) precision thin-walled parts may be deformed due to overheating of large current; (9) due to conductivity, The electrolytic polishing effect in the pit or hole of the product is not good; (10) The distance between the product surface and the conductive plate is different, resulting in inconsistent current at each position on the surface, which is easy to cause defects on the product surface

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