N-doped CrO2 epitaxial thin film and preparation method thereof

Abstract

The invention provides an N-doped CrO2 epitaxial thin film and a preparation method thereof. The method for preparing the N-doped CrO2 epitaxial thin film comprises the following steps: filling 75-99.99 parts by weight of CrO3 in a quartz boat, and putting the quartz boat into a low-temperature area of a double-temperature area tubular furnace; putting a TiO2 single crystal substrate into a high-temperature area of the double-temperature area tubular furnace; heating the high-temperature area to the temperature of 270-430 DEG C under the condition that N2 is continuously introduced into the tubular furnace at flow velocity of 150-250mL / min, and starting to maintain the temperature; starting to heat the low-temperature area while starting to maintain the temperature in the high-temperature area, heating the low-temperature area to the temperature of 240-280 DEG C, maintaining the temperature in the high-temperature area and the low-temperature area for 1.5-3 hours, thereby obtaining the N-doped CrO2 epitaxial thin film on the TiO2 single crystal substrate. According to the N-doped CrO2 epitaxial thin film disclosed by the invention, the preparation temperature interval is 270-430 DEG C, and the heat stability is greatly improved, so that the application range is wide.

Description

technical field [0001] The present invention belongs to the field of materials. Specifically relates to an N-doped CrO2 epitaxial film and a preparation method thereof. Background technique [0002] In recent years, spintronics has become one of the focuses of international condensed matter physics and materials science, and has attracted extensive attention. As the simplest ferromagnetic semimetal oxide CrO 2 is a traditional magnetic recording material, CrO 2 It has been confirmed by experiments that it has a spin polarizability close to 100%, and CrO 2 The Curie temperature is as high as 396K. Therefore, CrO 2 It is considered to be one of the electrode materials with great development potential and ideal spintronic devices. [0003] CrO 2 Although it is a magnetic material with good magnetic properties and a wide range of applications, it is in a metastable state at room temperature and has poor thermal stability. Currently the most commonly used is the O 2 Pr...

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Problems solved by technology

[0003] CrO 2 Although it is a magnetic material with good magnetic properties and a wide range of applications, it is in a metastable state at room temperature and has poor thermal stability.

Currently the most commonly used is the O 2 Preparation of CrO under the atmosphere 2 , but its preparation temperature can only be at 390 o Near C, higher than 400 o Cpure CrO 2 The material begins to decompose and Cr begins to appear in the film 2 o 3 impurity phase, lower than 380 o C, the CrO in the atmosphere 2 not available on TiO 2 Film formation or film formation rate on the substrate is extremely low

A recently proposed method for the preparation of CrO with Ar as the transport gas 2 epitaxial film, but he did not expand its preparation temperature range and thermal stability of the film, even though relatively easy to prepare CrO 2 Powder, for example, the patent number is "CN 101684002A" and the name is "a method for preparing nano-chromium dioxide", and its preparation temperature is only 350~380 o C

The currently disclosed methods are all just how to prepare high-purity CrO 2 material, yet to CrO 2 Specific preparation method of material doped with N element to improve its thermal stability

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