A kind of thermal shock-resistant high-temperature composite insulation layer and its preparation method

Abstract

The invention belongs to the technical field of thin film sensors, and provides a thermal shock-resistant high-temperature composite insulating layer and a preparation method thereof; the composite insulating layer includes a two-layer structure, which is Al from bottom to top 2 o 3 ~ Al‑O‑N gradient layer and microcrystalline Al 2 o 3 thin film insulating layer; the Al 2 o 3 ~The bottom layer of the Al‑O‑N gradient layer is Al 2 o 3 layer, the top layer is an amorphous Al-O-N film layer, and along the film growth direction, the content of N element increases. The composite film insulating layer of the present invention can form uniform and dense coverage on different parts such as the plane, bending, and folding of special-shaped precision components, effectively improve the uniformity and high-temperature insulation performance of the insulating layer, and effectively ensure the reliability of the film sensor under high temperature conditions and stability; at the same time, the solution method is used to prepare, and the sol-gel method can easily complete the coating of larger workpieces, which is beneficial to the realization of batch production; and the sol-gel method is low in cost and easy to operate. These factors make the present invention provide Composite insulating layer has a broader application prospect.

Description

Technical field [0001] The invention belongs to the technical field of thin film sensors, especially thin film sensors for testing the surface state parameters of special-shaped hot end parts such as aeroengines. Such thin film sensors can be used for the surface temperature, strain, etc. of hot end parts such as combustion chamber walls of aeroengines and turbine blades. Accurate testing of state parameters provides technical support for the design and optimization of aero-engines; specifically, a high-temperature composite insulating layer with thermal shock resistance and a preparation method are provided. Background technique [0002] With the continuous development of aero engines in the direction of high Mach, high thrust-to-weight ratio, and high reliability, they need to work in harsh environments such as high temperature, high pressure, and high airflow for a long time. The temperature distribution and strain on the surface of the combustion chamber and turbine blades aff...

AI Technical Summary

Problems solved by technology

This method has achieved good results on metal flat plates; however, the actual effect is always unsatisfactory when faced with special-shaped precision structural parts such as turbine blades

In the large-angle bending and folding parts of special-shaped structural parts, sputtering or evaporation technology cannot form a uniform and dense insulating layer. When the metal-sensitive functional layer is prepared by subsequent sputtering, the sputtered metal atoms have high energy and are easy to penetrate. The conduction phenomenon occurs due to the insulating layer, which makes the thin film sensor invalid

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