High-speed continuous rolling type lithium vacuum evaporation equipment and method for realizing base material lithium evaporation by utilizing equipment

A winding, high-speed technology, applied in the direction of vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of large pollution range and low utilization rate of metal lithium, and achieve cost saving, cooling and evaporation Coating thickness, good sealing effect

Active Publication Date: 2017-09-19
哈尔滨光宇电子有限公司
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the existing substrate evaporation lithium equipment has a low utilization rate of metal lithium, the evaporation thickness is ≤ 1 μm, and the pollution range is large during evaporation, so as to provide high-speed continuous winding vacuum evaporation lithium Equipment and method for realizing lithium vapor deposition on substrate by using same

Method used

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  • High-speed continuous rolling type lithium vacuum evaporation equipment and method for realizing base material lithium evaporation by utilizing equipment

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specific Embodiment approach 1

[0018] Specific implementation mode one: combine figure 1 , this embodiment is a high-speed continuous winding vacuum evaporation lithium equipment, which includes a body shell 1, a cavity baffle 2, an unwinding system 3, a substrate heater 4, a main roll 5, a cooling roll 6, and a winding system 7. Crucible 8, crucible fixing frame 9, crucible heater 10, insulation layer 11, crucible traverse lifting platform 12, unwinding transition roller 13, heating transition roller 14, cooling transition roller 15, upper cavity vacuum valve 16, lower cavity Vacuum valve 17 and feeding viewing window 18;

[0019] The high-speed continuous winding vacuum evaporation lithium equipment is divided into an upper cavity and a lower cavity by the cavity baffle 2 and the body shell 1. The unwinding system 3, substrate heater 4, cooling roll 6 and winding System 7 is set in the upper cavity of high-speed continuous winding vacuum evaporation lithium equipment, the unwinding transition roll 13 is ...

specific Embodiment approach 2

[0029] Specific implementation mode two: combination figure 1 The difference between this embodiment and the first embodiment is that the unwinding system includes an unwinding roller, a deviation correction system, a transition roller system, a substrate evaporation speed control system, a tension control system and a flattening system. Others are the same as the first embodiment.

specific Embodiment approach 3

[0030] Specific implementation mode three: combination figure 1 The difference between this embodiment and the first or second embodiment is that the winding system includes a winding roller, a mechanical expansion shaft, an AC drive motor, a frequency conversion controller, SKF bearings, a magnetic fluid seal, and a feeding gallows. Others are the same as those in Embodiment 1 or 2.

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Abstract

The invention discloses high-speed continuous rolling type lithium vacuum evaporation equipment and a method for realizing base material lithium evaporation by utilizing the equipment, and aims to solve the problems that existing base material lithium evaporation equipment is low in utilization rate on metal lithium, evaporation thickness is smaller than or equal to 1 [mu]m, and pollution range during evaporation is great. The high-speed continuous rolling type lithium vacuum evaporation equipment comprises a machine body housing, a cavity baffle plate, an unrolling system, a base material heater, a main roller, a cooling roller, a rolling system, a crucible, a crucible fixing frame, a crucible heater, a thermal insulation layer, a crucible transverse-moving lifting platform, an unrolling transition roller, a heating transition roller, a cooling transition roller, an upper cavity vacuum valve, a lower cavity vacuum valve and a charging visible window. The method has the advantages that evaporation thickness is guaranteed to be adjustable anytime within a range of 1 [mu]m to 100 [mu]m, and the highest utilization rate of metal lithium can be 90% or higher. The high-speed continuous rolling type lithium vacuum evaporation equipment is mainly used for base material lithium evaporation.

Description

technical field [0001] The invention relates to a base material evaporation lithium equipment and a method for realizing base material evaporation lithium using the equipment. Background technique [0002] The characteristics of elemental lithium materials are: lithium is easy to combine with oxygen, nitrogen, sulfur, etc., burns in water, and has strict storage conditions. Therefore, metal lithium can only be heated into gaseous vapor deposition under high vacuum. The existing large-scale equipment is for evaporation of aluminum, nickel, zinc and other materials, and the utilization rate of small-scale metal lithium evaporation equipment is only between 2% and 10%, and the evaporation thickness is ≤1μm. If the evaporation thickness increases, the uniformity cannot be achieved. Guaranteed, and the evaporation chamber is filled with lithium vapor during evaporation, and the pollution range is large during evaporation. Contents of the invention [0003] The purpose of the p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/14C23C14/56
CPCC23C14/14C23C14/24C23C14/562
Inventor 宋殿权张春涛管云飞
Owner 哈尔滨光宇电子有限公司
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