Layered electroforming method for slotted rectangular waveguides

Abstract

The invention discloses a layered electroforming method for a slotted rectangular waveguide and belongs to the field of electromachining. The layered electroforming method comprises the following steps that first, a layer of photoresists (2) is smeared on the surface of a substrate (1); second, first-time exposure is conducted; third, first-time developing is conducted; fourth, a first layer of copper (4) is electroformed; fifth, precise polish-grinding is conducted; sixth, a layer of photoresists (5) is smeared; seventh, second-time exposure is conducted; eighth, second-time developing is conducted; ninth, surface conductive treatment is conducted; tenth, microelectrolysis is conducted on the first layer of copper, and an oxidation film on the surface of the first layer of copper is removed; eleventh, a second layer of copper (8) is electroformed to form an electroformed body (9); twelfth, the redundant photoresists are dissolved, the electroformed body (9) are taken out, and the surface of the electroformed body is subjected to precise polish-grinding; and thirteenth, the electroformed body (9) is cleaned, and the slotted rectangular waveguide (10) is obtained. The slotted rectangular waveguide is obtained through two times of the copper electroforming, machining precision is high, and technological adaptability is high.

Description

Technical field

[0001] The layered electroforming method of a slotted rectangular waveguide of the present invention mainly relates to electroforming processing and belongs to the technical field of electric processing. Background technique

[0002] Terahertz waves refer to electromagnetic waves with frequencies ranging from 0.1 THz to 10 THz and wavelengths ranging from 0.03 mm to 3 mm. The unique properties of terahertz waves have had a profound impact on broadband communications, radar imaging, electronic countermeasures, electromagnetic weapons, security inspections, non-destructive testing and other fields, and have broad application prospects in the field of national security. For example, compared with microwave radar, terahertz radar has the advantages of high resolution, strong confidentiality, outstanding anti-interference ability, and strong ion body penetration ability.

[0003] Metal waveguide is a commonly used transmission line in the THz low-frequency band. ...

Examples

Embodiment Construction

[0028] The slotted rectangular waveguide that needs to be prepared is as Figure 10 As shown, the following preparation process is adopted:

[0029] Step 1: coating a layer of photoresist 2 with a thickness of L1 on the surface of the substrate 1;

[0030] Step 2: Place the substrate 1 that has been coated for the first time in step 1 on the stage of the lithography machine, and use the first exposure mask 3 to perform the first exposure;

[0031] Step 3: Put the substrate 1 after the first exposure in step 2 into the developing solution for the first development, wash and dry after development;

[0032] Step 4: Electroform a layer of thickness L1 on the surface of the substrate 1 after the first development in step 3

[0033] Copper 4;

[0034] Step 5: Perform precision polishing on the surface of the electroformed copper 4 in step 4 to ensure that the thickness of the first layer of copper 4 is L2;

[0035] Step 6: Coating a layer of photolithography with a thickness of ...

Technical field

[0001] The layered electroforming method of a slotted rectangular waveguide of the present invention mainly relates to electroforming processing and belongs to the technical field of electric processing. Background technique

[0002] Terahertz waves refer to electromagnetic waves with frequencies ranging from 0.1 THz to 10 THz and wavelengths ranging from 0.03 mm to 3 mm. The unique properties of terahertz waves have had a profound impact on broadband communications, radar imaging, electronic countermeasures, electromagnetic weapons, security inspections, non-destructive testing and other fields, and have broad application prospects in the field of national security. For example, compared with microwave radar, terahertz radar has the advantages of high resolution, strong confidentiality, outstanding anti-interference ability, and strong ion body penetration ability.

[0003] Metal waveguide is a commonly used transmission line in the THz low-frequency band. ...

Examples

Embodiment Construction

[0028] The slotted rectangular waveguide that needs to be prepared is as Figure 10 As shown, the following preparation process is adopted:

[0029] Step 1: coating a layer of photoresist 2 with a thickness of L1 on the surface of the substrate 1;

[0030] Step 2: Place the substrate 1 that has been coated for the first time in step 1 on the stage of the lithography machine, and use the first exposure mask 3 to perform the first exposure;

[0031] Step 3: Put the substrate 1 after the first exposure in step 2 into the developing solution for the first development, wash and dry after development;

[0032] Step 4: Electroform a layer of thickness L1 on the surface of the substrate 1 after the first development in step 3

[0033] Copper 4;

[0034] Step 5: Perform precision polishing on the surface of the electroformed copper 4 in step 4 to ensure that the thickness of the first layer of copper 4 is L2;

[0035] Step 6: Coating a layer of photolithography with a thickness of ...

Images