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Graphene/TiO2 nanopillar array Schottky junction ultraviolet photodetector and manufacturing method thereof

A technology of nano-column arrays and electrical detectors, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of being unable to withstand high temperature and corrosive environments, less ultraviolet light detectors, and rare applications of nanomaterials, and achieve superior performance , Large specific surface area, uniform size effect

Pending Publication Date: 2017-09-22
HEFEI UNIV OF TECH
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  • Description
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  • Application Information

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Problems solved by technology

Traditional si-based detectors have been developed for a long time, but they need additional bulky filters to remove visible light background interference, and are not suitable for high temperature and corrosive environments
In recent years, TiO 2 It is widely used in the research of solar cells, photocatalysis and other fields, but less used in the research of ultraviolet photodetectors. TiO with specific structure 2 The application of nanomaterials is even rarer

Method used

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  • Graphene/TiO2 nanopillar array Schottky junction ultraviolet photodetector and manufacturing method thereof
  • Graphene/TiO2 nanopillar array Schottky junction ultraviolet photodetector and manufacturing method thereof
  • Graphene/TiO2 nanopillar array Schottky junction ultraviolet photodetector and manufacturing method thereof

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Embodiment 1

[0030] see figure 1 , the graphene / TiO of this embodiment 2 The nanopillar array Schottky junction ultraviolet photodetector has the following structure:

[0031] TiO is grown on the upper surface of FTO glass 1 2 Nanopillar array 2, TiO 2 The nanopillar array uses FTO as the ohmic contact electrode; in TiO 2 The top of the nanopillar array 2 is provided with TiO 2 The nanocolumn array 2 is a graphene film 3 in Schottky contact, and an extraction electrode 4 in ohmic contact with the graphene film is drawn out from the graphene film 3 .

[0032] Among them: TiO 2 Nanopillar arrays for n-type TiO 2 ; The graphene film is an intrinsic graphene film prepared by CVD method. The thickness of the FTO glass used is 2.2mm, the light transmittance is greater than 90%, and the surface resistance is 14Ω.

[0033] Graphene / TiO of the present embodiment 2 The preparation method of the nanocolumn array Schottky junction ultraviolet photodetector is to carry out as follows:

[0034...

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Abstract

The invention discloses a graphene / TiO2 nanopillar array Schottky junction ultraviolet photodetector and a manufacturing method thereof. The TiO2 nanopillar array grows on the upper surface of FTO glass, and the array uses the FTO as an ohmic contact electrode; the top end of the TiO2 nanopillar array is provided with a graphene thin film with Schottky contact with the array, and an extraction electrode with ohmic contact with the graphene thin film is extracted on the graphene thin film. The ultraviolet photodetector uses the regularly-arranged TiO2 nanopillar array to increase the surface area of the material, excellent features of the graphene such as high transmittance and low resistivity are used, light absorption is enhanced, the light responsibility is improved, the device is strong in light absorption ability, sensitive in ultraviolet sensing and strong in electromagnetic interference resistance, and a new prospect for application of a TiO2 nanomaterial in the photodetector is developed.

Description

technical field [0001] The invention belongs to the field of semiconductor photodetectors, in particular to graphene / TiO 2 Nanocolumn array Schottky junction ultraviolet photodetector and its preparation method. Background technique [0002] Ultraviolet detection technology is another dual-use photoelectric detection technology developed after infrared and laser detection technology. In recent years, there has been an increasing demand for UV detection devices. Ultraviolet light detectors can be widely used in scientific research, military, space, environmental protection and many industrial fields. Such as ultraviolet light monitors in spaceships, solar ultraviolet monitoring of the ozone layer, thermal background flame detection, exhaust gas monitoring, etc. In addition, it can also be used in medicine, biology, etc., and can be used as an ultraviolet meter in daily life for personal use in environments rich in ultraviolet rays such as beaches and mountains. [0003] M...

Claims

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Application Information

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IPC IPC(8): H01L31/18H01L31/108H01L31/0352
CPCH01L31/035227H01L31/108H01L31/18
Inventor 梁凤霞王九镇罗林保张腾飞张登月
Owner HEFEI UNIV OF TECH
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