A damage control method for ultra-precision turning of crystal materials
A technology of crystal materials and control methods, applied in stone processing equipment, crystal growth, chemical instruments and methods, etc., can solve the problems of damage, large consumption of irradiated ions, high manufacturing cost, etc., achieve a large number and reduce irradiation Dosage and processing cost, effect of reducing processing cost
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[0023] 1. Design a multi-layer amorphous system according to the material to be processed and cutting parameters, determine the number, depth and thickness of the amorphous layer, and use the Monte Carlo (realized by SRIM software) numerical method to simulate the ion irradiation process and calculate the ion source , the combination of injection energy and dose parameters.
[0024] 2. According to the calculated implantation parameters, commercial ion implanters or high-energy accelerators are used to irradiate ions to complete the preparation of multi-layer amorphous structures inside the material;
[0025] 3. Combining the tool arc radius, cutting depth, geometric parameters of the amorphous layer and the brittle-plastic transition thickness of the workpiece material, determine the maximum feed rate allowed for turning;
[0026] 4. According to the above-mentioned turning parameters, carry out plane machining experiments on modified crystals and ordinary crystals.
[0027]...
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