Processing method and processing system for laser-induced graphene micronao structure

A technology of laser induction and processing methods, which is applied in chemical instruments and methods, nanotechnology, nanotechnology, etc., can solve the problems of failure to break through the diffraction limit of processing beams and unsatisfactory processing accuracy, and achieve the advantages of rapid processing, High precision and wide application effect

Active Publication Date: 2017-10-13
NANKAI UNIV
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Problems solved by technology

[0005] In the existing laser direct writing technology for processing graphene, the processing resolution can be improved by using the vector light field for proce

Method used

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  • Processing method and processing system for laser-induced graphene micronao structure
  • Processing method and processing system for laser-induced graphene micronao structure
  • Processing method and processing system for laser-induced graphene micronao structure

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Embodiment 1

[0035] For the present invention, adopt wavelength 800nm, repeat frequency 1000Hz, the blue titanium sapphire femtosecond laser system of pulse width 130fs; Adopt the microscopic objective lens focusing that magnification is 100 times, numerical aperture 1.45; On machine-controlled precise three-dimensional translation platform; The oxide-graphene-substrate material sandwich structure sample is processed with a one-dimensional grid structure and a two-dimensional rectangular structure; the specific optical path diagram is as follows image 3 As shown, the ultrashort laser pulse emitted by the femtosecond laser first passes through two positioning apertures to block stray light and ensure the propagation direction of the beam. After changing the propagation direction through the reflector, it passes through a pair of Glan-Taylor prisms. By adjusting the angle between the crystal axes of the two Glan-Taylor prisms, the transmitted laser power can be accurately adjusted in real ti...

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Abstract

The invention discloses a processing method and a processing system for a laser-induced graphene micronao structure. The method comprises the following steps: firstly, preparing a sandwich structural sample made of an oxide-graphene-substrate material; secondly, processing the sample by a laser direct writing system; and carrying out carbothermal reduction reaction on the graphene and oxide in a region exceeding threshold light intensity under the laser induction so as to damage the graphene, while graphene at other parts is not damaged and retained, thereby forming the graphene micronao structure. The method and the system, disclosed by the invention, are simple in operation, and exposure is realized without a mask plate, so that the problem of secondary sputtering in the processing process of ion beams is avoided; high-precision processing of a graphene structure and patterns can be realized; processing resolution can be regulated and controlled according to the sizes of laser spots and laser energy; quick processing of graphene patterns with complex structures and production of a high-quality graphene structural device are facilitated; and the processing method and the processing system can be widely popularized and applied.

Description

technical field [0001] The invention belongs to the field of advanced material preparation and processing, and relates to a laser-induced graphene micro-nano structure processing method and its system; in particular, it relates to a graphene micro-nano structure processing method and system based on laser-induced carbothermal reduction reaction, which It is suitable for the field of micro-nano processing based on laser direct writing and structured processing based on graphene. Background technique [0002] As an emerging two-dimensional material, graphene has attracted extensive attention in scientific research and application fields all over the world. Its various excellent performances have begun to trigger a subversive revolution in various industries, from integrated circuits to electromagnetic regulation, to new energy supercapacitors and other fields. In 2015, the state included graphene into the key technology project of "Made in China 2025", which clarified the dev...

Claims

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Application Information

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IPC IPC(8): C01B32/194B82Y30/00
CPCB82Y30/00C01P2004/10C01P2004/20
Inventor 张心正许京军石彬徐晓丹刘洋任梦昕蔡卫吴强伊瑞娜
Owner NANKAI UNIV
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