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Multi-principal-element alloy target material and preparation method thereof

A multi-principal alloy, alloy target technology, applied in metal material coating process, ion implantation plating, coating and other directions, to achieve the effect of uniform heating, uniform composition and structure, and short sintering time

Active Publication Date: 2017-11-07
ZZQH PRECISION TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although some domestic universities and research institutes have developed targets, they are still in the stage of theoretical research and trial production, and a large number of targets still need to be imported every year.

Method used

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  • Multi-principal-element alloy target material and preparation method thereof
  • Multi-principal-element alloy target material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] The invention provides a multi-principal alloy target, which is specifically an alloy target containing metal elements Al, Co, Cr, Ni, Mn and Mg, and its chemical composition is Al x CoCrNi y mn z Mg r , x=1; y=1; z=1; r=0.3.

[0021] The preparation method of the above-mentioned multi-principal alloy target comprises the following steps:

[0022] (1) According to the chemical composition AlCoCrNiMnMg 0.3 Weigh 0.40mol aluminum powder, 0.40mol cobalt powder, 0.40mol chromium powder, 0.40mol nickel powder and manganese powder and 0.12mol magnesium powder respectively, and set aside; the purity of each of the above metal powders is higher than 99.5%, and each metal powder The particle size is 200-500 mesh;

[0023] (2) Put the metal powder weighed in step (1) into a ball milling jar, add an appropriate amount of stainless steel balls, and then seal the ball milling jar with the metal powder in a nitrogen environment; then put the sealed ball milling jar Place on a p...

Embodiment 2

[0026] The invention provides a multi-principal alloy target, which is specifically an alloy target containing metal elements Al, Co, Cr, Ni, Mn and Mg, and its chemical composition is Al x CoCrNi y mn z Mg r , x=1; y=1; z=1; r=1.

[0027] The preparation method of the above-mentioned multi-principal alloy target comprises the following steps:

[0028] (1) Weigh 0.40mol aluminum powder, 0.40mol cobalt powder, 0.40mol chromium powder, 0.40mol nickel powder, 0.40mol manganese powder and 0.40mol magnesium powder according to the chemical composition AlCoCrNiMnMg, and set aside; Higher than 99.5%, the particle size of each metal powder is 200-500 mesh;

[0029] (2) Put the metal powder weighed in step (1) into a ball milling jar, add an appropriate amount of stainless steel balls, and then seal the ball milling jar with the metal powder in a nitrogen environment; then put the sealed ball milling jar Place on a planetary ball mill for mixing, the mixing speed is 200rpm, and th...

Embodiment 3

[0032] The invention provides a multi-principal alloy target, which is specifically an alloy target containing metal elements Al, Co, Cr, Ni, Mn and Mg, and its chemical composition is Al x CoCrNi y mn z Mg r , x=1; y=1; z=0.3; r=1.

[0033] The preparation method of the above-mentioned multi-principal alloy target comprises the following steps:

[0034] (1) According to the chemical composition AlCoCrNiMn 0.3 Mg takes by weighing 0.40mol aluminum powder, 0.40mol cobalt powder, 0.40mol chromium powder, 0.40mol nickel powder, 0.40mol magnesium powder and 0.12mol manganese powder respectively, for subsequent use; the purity of each of the above metal powders is higher than 99.5%. The particle size of each metal powder is 200-500 mesh;

[0035] (2) Put the metal powder weighed in step (1) into a ball milling jar, add an appropriate amount of stainless steel balls, and then seal the ball milling jar with the metal powder in a nitrogen environment; then put the sealed ball mil...

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Abstract

The invention relates to a multi-principal-element alloy target material and a preparation method thereof. The multi-principal-element alloy is Al<x>CoCrNi<y>Mn<z>Mg<r>, wherein x is equal to or larger than 0.2 and smaller than or equal to 1.5, y is equal to or larger than 0.2 and smaller than or equal to 1.5, z is equal to or larger than 0.2 and smaller than or equal to 1.5, r is equal to or larger than 0.2 and smaller than or equal to 1.5, the proportion of x and the sum of x, y, z, r and 2 is equal to or larger than 0.05 and smaller than or equal to 0.35, the proportion of y and the sum of x, y, z, r and 2 is equal to or larger than 0.05 and smaller than or equal to 0.35, the proportion of z and the sum of x, y, z, r and 2 is equal to or larger than 0.05 and smaller than or equal to 0.35, and the proportion of r and the sum of x, y, z, r and 2 is equal to or larger than 0.05 and smaller than or equal to 0.35. The preparation method comprises the specific steps that all metal powder is weighed according to the chemical composition and subjected to ball milling to be even under inert gas, then mixed powder is loaded into a graphite mold under protection of the inert gas, and the mold is loaded into a discharge plasma sintering furnace; and prepressure loading, vacuumizing, temperature increasing and heat preservation are sequentially conducted, and then the alloy material is obtained. The multi-principal-element alloy target material is even in product component and structure, fine in grain size and high in compactness.

Description

technical field [0001] The invention belongs to the technical field of metal material preparation, and in particular relates to a multi-principal alloy target material and a preparation method thereof. Background technique [0002] Since the 1990s, with the rapid development of the new material industry, electronic, magnetic, optical, photoelectric and superconducting thin films have been widely used in high-tech and industrial fields, which has promoted the expansion of the sputtering target market. At present, the target production countries mainly include Japan, the United States and Germany, etc., while the research and development of the target industry in my country is relatively lagging behind. Although some domestic universities and research institutes have developed target materials, they are still in the stage of theoretical research and trial production, and a large number of target materials still need to be imported every year. According to the composition, the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C22C30/00C22C1/04
CPCC22C1/04C22C30/00C23C14/3407C23C14/3414
Inventor 马明星聂绍乾王志新张志汉
Owner ZZQH PRECISION TECH CO LTD
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