Electron gun special-purpose multi-position preprocessing device

Abstract

The present invention discloses an electron gun special-purpose multi-position preprocessing device, relates to the electron gun technology, and especially to the electron gun preprocessing technology. The objective of the invention is to improve the processing work efficiency and convenience through simultaneous preprocessing of multiple electron guns. The device comprises an electron gun main body storage pipeline, electron gun variable-diameter interfaces, a superhigh vacuum valve and an ion pump, etc. The wall of the electron gun main body storage pipeline is provided with a plurality of electron gun variable-diameter interfaces; and moreover, the structure is employed to perform high-voltage insulation test, decomposition, activation and aging of the electron guns to realize vacuum independence of each electron gun and allow each station not to be used at the same time so as to improve the efficiency and the convenience of the preprocessing of the electron guns and greatly shorten the period of the electron guns entering a normal work state.

Description

technical field [0001] The invention relates to electron gun technology, in particular to electron gun pretreatment technology. Background technique [0002] The electron accelerator is a device for accelerating charged particles, among which the electron linear accelerator is a resonant accelerator that uses high microwave power to establish a longitudinal electric field in the traveling wave and standing wave acceleration structure to accelerate the electron beam. The beam current is increased to extremely high energy, so it occupies a unique position in the accelerator; the electron gun is an indispensable and important component of the electron linear accelerator, which emits electrons with a certain energy, a certain current intensity, a certain beam diameter and an emission angle. The beam is injected into the accelerating tube of the accelerator, which is also a vacuum electronic device. [0003] After the electron gun is assembled, there is a process of transportati...

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Problems solved by technology

[0004] Wang Guicheng and others reported a vacuum device for electron gun pretreatment (activation and aging of 20OMeV linear accelerator oxide cathode grid-controlled electron gun. Journal of University of Science and Technology of China, March 1985 Supplement: 137-140.), which adopts the structure of Faraday cylinder , but the device can only handle one electron gun at a time, the work efficiency is low, and it is not conducive to the expenditure of mass production and processing of electron guns; at the same time, if each electron gun is equipped with a set of corresponding devices, it will increase the production cost and bring Inconvenient

In addition, there are no reports of electron guns and processing devices for mass production.

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