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Metamaterial-based wireless excitation small-sized microwave micro plasma array source

A technology of micro-plasma and wireless excitation, applied in the direction of plasma, electrical components, etc., can solve the problems of increased power source cost, uneven electromagnetic field distribution, uneven microwave micro-plasma array, etc., to achieve increased size and small volume Effect

Active Publication Date: 2018-01-05
EAST CHINA NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Since the array source with this structure has multiple resonant frequencies, the cost of the power source increases, and the electromagnetic field distribution at the gap of the large-area C-type split-ring resonator (SSRR) array unit is not uniform, so that the excited microwave microplasma array not even

Method used

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  • Metamaterial-based wireless excitation small-sized microwave micro plasma array source
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  • Metamaterial-based wireless excitation small-sized microwave micro plasma array source

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Embodiment 1

[0026] This embodiment provides a metamaterial-based wireless excitation 2.45GHz miniaturized planar microwave microplasma array source, including a transmitting antenna 1 , a microstrip resonator array 2 based on a DSRR structure and a dielectric plano-convex lens 3 . When working, the microwave power is fed into the circular microstrip patch 10 through the SMA coaxial connector 14, and the electromagnetic wave is uniformly propagated through the dielectric plano-convex lens 3. When the microstrip resonator array 2 based on the DSRR structure resonates, the super The gaps 23 and 24 in the material structure excite a uniform array of planar microwave micro-plasmas, thereby realizing a wirelessly excited microwave micro-plasma uniform array based on metamaterials.

[0027] In this embodiment, the radius of the circular microstrip patch 10 is 11.5 mm, the distance from the feeding point 12 to the center point is 2 mm, and the dielectric substrate 11 of the transmitting antenna 1 ...

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Abstract

The invention discloses a metamaterial-based wireless excitation small-sized microwave micro plasma array source. The array source comprises a transmitting antenna, a metamaterial structure-based microstrip resonator array and a dielectric plano-convex lens, wherein the transmitting antenna is a microstrip patch antenna, and comprises rectangular, circular, oval and circular annular patches and the like to feed through coaxial lines; the dielectric substrate of the metamaterial structure-based microstrip resonator array faces one side of the dielectric plano-convex lens; the array unit structure is a square or circular double-split resonant rings (DSRR) and the like; and the dielectric plano-convex lens is positioned between the transmitting antenna and the microstrip resonator array. Whenthe array source is in use, the microstrip patch antenna transmits microwave energy, and electromagnetic wave is uniformly propagated in a plane wave form through the dielectric plano-convex lens; and when the metamaterial structure-based microstrip resonator array suffers from resonance, the plane microwave micro plasma uniform arrays are excited in the gaps of the metamaterial structure. The array source has the advantages of miniaturization, wireless excitation plane microwave micro plasmas uniform arrays and the like.

Description

technical field [0001] The invention relates to the technical field of microwave plasma sources, in particular to a metamaterial-based wireless excitation 2.45GHz miniaturized planar microwave microplasma array source. Background technique [0002] Low-power microwave micro-plasma technology is a high-tech developed in recent years that integrates microelectronics technology, microwave technology and plasma technology. It develops along with the development of MEMS technology. Micro plasmas include direct current micro plasmas, radio frequency micro plasmas and microwave micro plasmas. When the discharge space is further reduced to a nanometer size, it becomes a nanoplasma. Because microelectromechanical systems (MEMS) have the characteristics of low loss, high isolation, small size, low manufacturing cost, and easy integration with IC and MMIC circuits, low-power packaging and active integration of microwave plasma can be realized through MEMS technology. Therefore, combi...

Claims

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Application Information

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IPC IPC(8): H05H1/46
Inventor 廖斌郭义
Owner EAST CHINA NORMAL UNIV
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