Process for manufacturing Wolter-I reflector by means of copying

Abstract

The invention discloses a process for manufacturing a Wolter-I reflector by means of copying. The process includes the following steps that: a precision mandrel used for copying is manufactured; a DLCfilm is applied by means of the PVD (Physical Vapor Deposition) process; a gold film reflective layer is applied by means of the PVD process; a reflector shell is obtained through electroforming; thesurface of the reflector shell is trimmed; a reflector is released from the mandrel in a low-temperature refrigeration room by using a mold release device; and the surface of the reflector is washed.According to the process of the invention, DLC is applied between the copying gold film and the surface of the mandrel so as to be adopted as a release layer, and therefore, the gold film can be effectively prevented being damaged, and the smooth release of the gold film from the mandrel can be facilitated; the gold film is plated at the rotation surface and two end surfaces of the mandrel simultaneously, and therefore, electroforming nickel can be prevented from infiltrating between the gold film at the end surfaces of the mandrel and the surface of the mandrel during an electroforming process; electroforming time can be prolonged, the strength of the reflector shell is increased, the deformation of the reflector shell is prevented, and the reflector shell is easy to shell, transport andinstall; and the mandrel is made to be separated from the reflector shell through an auxiliary shelling device in the low-temperature room, and therefore, the manufacturing cost increase of the reflector and health hazards can be avoided.

Description

technical field [0001] The invention belongs to the technical field of optics and precision manufacturing, and relates to a method for duplicating and manufacturing a Wolter-I reflector. Background technique [0002] Since the wavelengths of extreme ultraviolet light, soft X-rays and hard X-rays are very short, the refractive index in the medium is close to 1, so they cannot be focused by refraction, and reflective optical systems must be used to focus them. However, this short-wavelength light is easily absorbed by surrounding substances or directly penetrates most substances, and its light reflectivity for most substances is extremely low. However, the refractive index of this kind of light in ordinary substances is slightly less than 1, so when the light enters the reflecting substance from a vacuum, when the incident angle is close to 90 degrees, total reflection can occur. Utilizing this total reflection phenomenon, X-ray grazing incidence optics is created, and the wi...

AI Technical Summary

Problems solved by technology

However, building a low-temperature liquid nitrogen cooling system will increase the manufacturing cost of the reflector, and careless operation in a low-temperature liquid nitrogen environment will cause health hazards (such as: frostbite, nitrogen inhalation, etc.)

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