Applications of nanometer needle electrode in ultrahigh density electrochemical sensing analysis
An ultra-high-density, nano-needle technology, applied in the field of chemical analysis, can solve problems affecting the accuracy of electrochemical quantification and achieve good reproducibility
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[0022] The invention can be better understood from the following examples. However, those skilled in the art will easily understand that the content described in the embodiments is only for illustrating the present invention, and shall not and will not limit the present invention described in the claims.
[0023] Fabrication of nanoneedle electrode arrays and ECL imaging.
[0024] (1) Fabrication of nanoneedle electrode arrays.
[0025] Nanoneedle electrode arrays were prepared according to the methods reported in the literature, such as Figure 9 shown. (Alves, M.A.R.; Takeuti, D.F.; Braga, E.S. Microelectronics J. 2005, 36, 51–54; Han, J.; Lu, S.; Li, Q.; Li, X.; Wang, J.; Sens. Actuators A Phys.2009, 152, 75–79.), 4-inch, p-type, silicon wafer, resistivity 1-20 Ω cm, thickness 500 mm, cleaned with standard RCA and thermally oxidized to produce 200 nm of SiO 2 layer. Photolithographic templates are generated by photolithography and transferred to SiO by reactive ion et...
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