A Method for Reducing Residual Stress of Tetrahedral Amorphous Carbon Film for Optical Window

A technology of tetrahedral amorphous carbon and optical windows, which is applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of large residual stress of the film, poor environmental adaptability, and hindering application fields, etc., and achieve stress The regulation method is simple and effective, the regulation process is simple, and the optical properties are not affected

Active Publication Date: 2019-05-03
陕西物科微达光学仪器有限公司
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Problems solved by technology

ta-C membrane sp 3 The problems of high hybridization, large internal residual stress and poor environmental adaptability of the film have hindered its application field.

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  • A Method for Reducing Residual Stress of Tetrahedral Amorphous Carbon Film for Optical Window
  • A Method for Reducing Residual Stress of Tetrahedral Amorphous Carbon Film for Optical Window
  • A Method for Reducing Residual Stress of Tetrahedral Amorphous Carbon Film for Optical Window

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[0031] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0032] An embodiment of the present invention provides a method for reducing the residual stress of a tetrahedral amorphous carbon film for an optical window. The method is: quickly put the prepared substrate into a vacuum chamber, and the working gas is argon with a purity of 99.999%; The vacuum chamber is pumped to a vacuum degree of 5.0×10 by a mechanical pump and a molecular pump. -4 Pa, after X time, the vacuum degree is controlled to be 5.0×10 -2Pa, film deposition is carried out on the substrate through the target material, and at the same time, the stress control of the tetrahedral amorpho...

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Abstract

The invention relates to a method for reducing the residual stress of a tetrahedral amorphous carbon film for an optical window. The method comprises the following steps: rapidly putting a prepared substrate on a base clamp of a vacuum chamber, and using argon gas of which the purity is 99.999% as working gas; pumping the vacuum chamber through a mechanical pump and a molecular pump until the vacuum degree is 5.0*10-4Pa; opening an argon gas valve, controlling the flow rate at 15sccm, and controlling the vacuum degree at 5.0*10-2Pa; setting the bias voltage of a base at 150V, using a microwave-assisted exciting source to produce plasmas, and carrying out sputtering cleaning on the substrate; controlling that the cleaning process is carried out for 2 minutes; then, carrying out standing for5 minutes, and cooling the base; repeatedly carrying out cleaning for 5 times, enabling the actual sputtering cleaning time to be 10 minutes, and spending 35 minutes on the whole cleaning technology;and after finishing cleaning, carrying out film deposition on the substrate through a target material, and at the same time, finishing the stress regulation of the tetrahedral amorphous carbon film which is formed through film deposition by regulating the bias voltage of the base, the bias voltage of a magnetic circuit and the flow rate of the argon gas.

Description

technical field [0001] The invention belongs to the technical field of optical thin film deposition, and in particular relates to a method for reducing the residual stress of a tetrahedral amorphous carbon film for an optical window. Background technique [0002] Diamond-like carbon (DLC) film is a kind of amorphous carbon film, because the carbon atoms in diamond and graphite are separated by sp 3 and sp 2 Bonding, so the DLC film exhibits properties between diamond and graphite. The excellent optical performance of DLC film makes it the preferred material to replace conventional infrared materials. It is often used as an anti-reflection protective film on the surface of infrared windows. It is successively used in periscope infrared windows, army sight infrared windows, aircraft forward-looking infrared windows, remote sensing Satellite receiving window and other systems. These systems are equivalent to the "eyes" of the entire system, but these "eyes" are often also on...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/34
CPCC23C14/0605C23C14/345C23C14/3492
Inventor 吴慎将苏俊宏李党娟王娜徐均琪尚小燕杨利红李建超
Owner 陕西物科微达光学仪器有限公司
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