The invention relates to the technical field of composite resin preparation, and discloses a
silicon-
molybdenum alloy target material preparation method which comprises the following steps: preparing raw materials, selecting
molybdenum powder and
silicon powder with the purity not lower than 99.9%, mixing, putting the raw materials into a vacuum mixer, vacuumizing to 0.01-0.1 Pa, stirring for 1-5 hours, carrying out ultrasonic assistance, controlling the temperature to 25-40 DEG C to prevent oxidation, and carrying out a forming process. Filling the mixed
powder into a detachable hard
alloy mold coated with a 0.05-0.2 mm
boron nitride coating, carrying out cold press molding, maintaining the pressure for 5-20 minutes to obtain a biscuit,
sintering, putting the biscuit into a
vacuum sintering furnace, firstly carrying out
microwave-assisted heating, then raising the temperature to 1500-1800 DEG C, introducing trace
argon in the later period to regulate and control a structure, carrying out a post-treatment process, carrying out
numerical control processing on a sintered target material, carrying out
chemical cleaning on the
mixed solution of
hydrofluoric acid and
nitric acid, and finally carrying out
vacuum sintering. Performing
plasma treatment; and finally, performing vacuum packaging and filling high-purity
nitrogen. The raw materials are high in purity and excellent in
granularity; uniformly mixing and preventing oxidation; forming and
sintering are precisely controlled, and the quality of the target material is guaranteed; the surface performance is improved through post-treatment, packaging is
oxygen-proof and
moisture-proof, and the target material meets the high-end industry requirement.