Large-area and high-quality graphene transferring method

A transfer method and graphene technology, applied in the field of material science, can solve problems such as easy breakage and damage, graphene polymer residues, and graphene films are prone to wrinkles, and achieve the effect of low resistance and high-quality transfer.

Inactive Publication Date: 2018-04-03
SHANGHAI UNIV OF MEDICINE & HEALTH SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the current development of graphene transfer technology is not satisfactory: during the transfer process, the graphene film is prone to wrinkles, e

Method used

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  • Large-area and high-quality graphene transferring method

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Experimental program
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Effect test

Embodiment 1

[0035] A method for transferring large-area high-quality graphene, comprising the steps of:

[0036] (1) Using Cu as the growth substrate, graphene was prepared by chemical deposition. Cut the grown graphene / Cu of 50cm*50cm, spread the graphene / Cu on a clean and smooth glass, and clamp the graphene / Cu with another piece of the same glass. Pass the rolling group, the rolling speed is 5cm / min, so that the graphene / Cu is flattened.

[0037] (2) Place the flattened graphene / Cu on the conveyor belt and transmit it at a speed of 2cm / s. At the same time, the conveyor belt is provided with a PMMA spraying array, and the PMMA slurry is evenly sprayed on the graphite by the PMMA spraying array in the transmission process. On one surface of ene / Cu. Wherein, the PMMA content in the PMMA slurry is 1.5% (w / w), the solvent is ethyl acetate, and the spraying speed is 10mL / s.

[0038] (3) Heat the PMMA-coated graphene / Cu on a heating platform. At this time, do not feed nitrogen to pressuriz...

Embodiment 2

[0049] A method for transferring large-area high-quality graphene, comprising the steps of:

[0050] (1) Using Cu as the growth substrate, graphene was prepared by chemical deposition. Cut the grown graphene / Cu of 50cm*50cm, spread the graphene / Cu on a clean and smooth glass, and clamp the graphene / Cu with another piece of the same glass. Pass the rolling group, the rolling speed is 2cm / min, so that the graphene / Cu is flattened.

[0051] (2) Place the flattened graphene / Cu on the conveyor belt and transmit it at a speed of 8cm / s. At the same time, the conveyor belt is provided with a PMMA spraying array, and the PMMA slurry is uniformly sprayed on the graphite by the PMMA spraying array in the transmission process. On one surface of ene / Cu. Wherein, the PMMA content in the PMMA slurry is 1% (w / w), the solvent is ethyl acetate, and the spraying speed is 5mL / s.

[0052] (3) Heat the PMMA-coated graphene / Cu on a heating platform. At this time, do not feed nitrogen to pressuriz...

Embodiment 3

[0062] A method for transferring large-area high-quality graphene, comprising the steps of:

[0063] (1) Using Cu as the growth substrate, graphene was prepared by chemical deposition. Cut the grown graphene / Cu of 50cm*50cm, spread the graphene / Cu on a clean and smooth glass, and clamp the graphene / Cu with another piece of the same glass. Pass the rolling group, the rolling speed is 3cm / min, so that the graphene / Cu is flattened.

[0064] (2) Place the flattened graphene / Cu on the conveyor belt and transmit it at a speed of 10cm / s. At the same time, the conveyor belt is provided with a PMMA spraying array, and the PMMA slurry is evenly sprayed on the graphite by the PMMA spraying array in the transmission process. On one surface of ene / Cu. Wherein, the PMMA content in the PMMA slurry is 3% (w / w), the solvent is ethyl acetate, and the spraying speed is 8mL / s.

[0065] (3) Heat the PMMA-coated graphene / Cu on a heating platform. At this time, do not feed nitrogen to pressurize,...

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Abstract

The invention discloses a large-area and high-quality graphene transferring method and belongs to the technical field of material science. The transferring method comprises steps as follows: graphene/Cu is flattened; PMMA slurry is uniformly sprayed to one surface of graphene/Cu; graphene/Cu with sprayed PMMA slurry is heated, and PMMA/graphene/Cu is obtained; Cu is etched, and PMMA/graphene is obtained; PMMA/graphene is cleaned, clean PMMA/graphene is flatly spread on a target substrate, and a PMMA/graphene/target substrate is obtained; the PMMA/graphene/target substrate is heated under normal pressure, nitrogen is introduced, and high-pressure heating is performed; the PMMA/graphene/target substrate is irradiated with deep ultraviolet; PMMA is removed, and graphene/target substrate is soaked to be cleaned and blown with nitrogen to be dried. Graphene obtained through transferring has no folds or damage, and large-area and high-quality transferring of graphene is realized.

Description

technical field [0001] The invention relates to the technical field of material science, in particular to a transfer method of large-area high-quality graphene. Background technique [0002] Since the discovery of graphene in 2004, the research on graphene has received great attention from scientists all over the world. Graphene is a two-dimensional material composed of a single layer of carbon atoms tightly stacked. It has unique electronic properties and can be widely used in transparent electrodes, field effect transistors, sensors, etc., and has attracted great attention from the industry. [0003] Controllable preparation of high-quality, large-area high-quality monolayer, single-crystal graphene is a trend in graphene synthesis. The main preparation methods of graphene include mechanical exfoliation method, chemical exfoliation method, SiC epitaxial growth method, chemical vapor deposition (CVD) method, etc. Among them, CVD method is very important in the preparation ...

Claims

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Application Information

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IPC IPC(8): C01B32/194
Inventor 曾冬冬
Owner SHANGHAI UNIV OF MEDICINE & HEALTH SCI
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