Microfluidic device
A fluid and tiny technology, applied in measurement devices, fluid controllers, optics, etc., can solve problems such as residues and separation of droplets 51 into multiples, and achieve the effect of high flatness
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Embodiment approach 1
[0082] based on Figure 1 ~ Figure 3 One embodiment of the present invention will be described below.
[0083] In this embodiment, an active matrix dielectric electrowetting (AM-EWOD) device in which segment electrodes are arranged in a matrix is described as an example of the microfluidic device according to the present embodiment. Hereinafter, for convenience of description, constituent elements having the same functions as those described in the background art will be described with the same reference numerals attached thereto.
[0084]
[0085] figure 1 It is a cross-sectional view schematically showing an example of a schematic configuration of a main part of the microfluidic device 1 according to the present embodiment. figure 2 It is a plan view schematically showing an example of a schematic structure of the thin-film electronic circuit layer 12 in the microfluidic device 1 according to the present embodiment.
[0086] Such as figure 1 as well as figure 2 ...
Embodiment approach 2
[0216] based on Figure 4 This embodiment will be described below. In addition, in this embodiment, differences from Embodiment 1 will be mainly described, and constituent elements having the same functions as those used in Embodiment 1 will be given the same reference numerals and description thereof will be omitted.
[0217]
[0218] Figure 4 It is a cross-sectional view showing an example of a schematic configuration of a main part of the microfluidic device 1 according to the present embodiment.
[0219] Such as Figure 4 As shown, the microfluidic device 1 according to the present embodiment has the same structure as the microfluidic device 1 according to the first embodiment except that the second planarizing resin layer 16 covers the plurality of electrodes 14 on the array substrate 10 .
[0220] In the present embodiment, the second planarizing resin layer 16 is laminated on the first planarizing resin layer 13 so as to fill the contact hole 19 and cover the electr...
Embodiment approach 3
[0237] based on Figure 5 This embodiment will be described below. In addition, in this embodiment, differences from Embodiments 1 and 2 will be mainly described, and components having the same functions as those used in Embodiments 1 and 2 will be given the same reference numerals, and Its description is omitted.
[0238]
[0239] Figure 5 It is a cross-sectional view showing an example of a schematic configuration of a main part of the array substrate 10 according to this embodiment.
[0240] Such as Figure 5 As shown, the microfluidic device 1 according to this embodiment is similar to Embodiments 1 and 2 except that the ion blocking layer 17 covers the plurality of electrodes 14 on the array substrate 10 and the second planarizing resin layer 16 covers the ion blocking layer 17. The involved microfluidic device 1 has the same structure.
[0241] That is, in this embodiment, the ion barrier layer 17 is provided between the electrode 14 and the second planarizing re...
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