Atomic layer deposition regeneration process of denitration catalyst
An atomic layer deposition, denitration catalyst technology, applied in catalyst regeneration/reactivation, physical/chemical process catalyst, metal/metal oxide/metal hydroxide catalyst, etc., can solve high oxidation, increase production cost, catalyst damage and other problems, to achieve the effects of good dispersibility, high denitration efficiency and low SO2 oxidation rate
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Embodiment 1
[0012] An atomic layer deposition regeneration process for a denitration catalyst, comprising the steps of:
[0013] 1) Pretreatment of the deactivated denitrification catalyst: remove the dust on the surface of the deactivated denitrification catalyst by a negative pressure vacuum cleaner, then immerse the catalyst in a deionized aqueous solution containing 0.06% lactic acid and 0.12% oxalic acid, ultrasonicate at 25HZ for 35min, take it out and store it at 125°C Dry for 35 minutes;
[0014] 2) Implantation of active substances by atomic layer deposition method: put the catalyst treated in step 1) into the reaction chamber of the atomic layer deposition equipment, and seal the reaction chamber; vacuumize the atomic layer deposition system and introduce high-purity nitrogen gas to adjust The outlet valve of the reaction chamber makes the pressure in the chamber negative, and the deposition temperature is set at 330°C; the vanadium triisopropoxylate precursor is injected into t...
Embodiment 2
[0016] An atomic layer deposition regeneration process for a denitration catalyst, comprising the steps of:
[0017] 1) Pretreatment of the deactivated denitrification catalyst: remove the dust on the surface of the deactivated denitrification catalyst by a negative pressure vacuum cleaner, then immerse the catalyst in a deionized aqueous solution containing 0.09% lactic acid and 0.18% oxalic acid, ultrasonicate at 35HZ for 55min, take it out and store it at 145°C Dry for 85min;
[0018] 2) Implantation of active substances by atomic layer deposition method: put the catalyst treated in step 1) into the reaction chamber of the atomic layer deposition equipment, and seal the reaction chamber; vacuumize the atomic layer deposition system and introduce high-purity nitrogen gas to adjust The outlet valve of the reaction chamber makes the pressure in the chamber negative, and the deposition temperature is set at 380°C; the precursor of triisopropoxyvanadium oxide is injected into th...
Embodiment 3
[0020] An atomic layer deposition regeneration process for a denitration catalyst, comprising the steps of:
[0021] 1) Pretreatment of the deactivated denitrification catalyst: remove the dust on the surface of the deactivated denitrification catalyst by a negative pressure vacuum cleaner, then immerse the catalyst in a deionized aqueous solution containing 0.08% lactic acid and 0.14% oxalic acid, sonicate at 30HZ for 40min, take it out and store it at 135°C Dry for 55 minutes;
[0022] 2) Implantation of active substances by atomic layer deposition method: put the catalyst treated in step 1) into the reaction chamber of the atomic layer deposition equipment, and seal the reaction chamber; vacuumize the atomic layer deposition system and introduce high-purity nitrogen gas to adjust The outlet valve of the reaction chamber keeps the pressure in the chamber at negative pressure, and the deposition temperature is set at 365°C; the vanadium oxide precursor of acetylacetonate is i...
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