Wide-range high-precision micro-current measurement system and method
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- BEIJING SDL TECH
- Publication Date
- 2020-10-23
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Abstract
Description
technical field
[0001] The invention relates to a micro-current measurement system and method, in particular to a wide-range and high-precision micro-current measurement system and method, which can be applied to the detection field of ion current, photocurrent and other weak currents in various instruments and equipment. Background technique
[0002] In instrument measurement, it is often necessary to detect various current signals, such as the current of ion fragments bombarded by the ionization source of a mass spectrometer, the ionization current of a gas chromatograph hydrogen flame, the total ion current converted from vacuum by an ionization vacuum gauge, and weak light signals The generated photocurrent and so on, these current signals are often ranging from "fA" level to "mA" level, not only require extremely weak current detection capability, but also require sufficient measurement resolution in a relatively wide measurement range, so The wide-range weak current me...