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Electrochemistry-based micro-component reliable and nondestructive operation

A micro-component, electrochemical technology, applied in chemical process analysis/design, electrical digital data processing, design optimization/simulation, etc.

Inactive Publication Date: 2018-06-01
HARBIN UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Due to the scale effect, surface / interface effect, quantum effect and multi-field coupling effect caused by the continuous reduction of size during the operation, the micro / nano operation is different from the macro operation and has the particularity of force; in addition, in the actual In the assembly process of micro-scale functional devices, it is usually necessary to assemble micro / nano components or devices instead of simple particle assembly, and the components to be assembled are usually in a multi-component environment, which makes micro-operations in practical applications unique. complexity of

Method used

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  • Electrochemistry-based micro-component reliable and nondestructive operation

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Experimental program
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specific Embodiment 1

[0016] First, the electrochemical theory and the force between the operating object and the substrate are studied, and the analysis demonstrates that by depositing metal ions in the salt solution in the microelectrode, forming a firm micro-metal column in the operating electrode that is completely combined with the operating object to overcome the problem The feasibility of operating the force between the object and the substrate; and the feasibility of accurate and non-destructive release of the micro metal pillars formed during the electrolytic pick-up process, and the feasibility of the method is verified through actual operation. On this basis, an accurate force model for electrochemical pick-up and release is established. Based on this model and related theories of physical mechanics, material mechanics, and elastic mechanics, the relationship between the size of the micro-component and the size of the micro-electrode required for pick-up and release is obtained. Correspon...

specific Embodiment 2

[0018] If the operation point is not selected properly when picking up, it is easy to cause slippage, resulting in failure of operation and easy damage to the operation electrode. But not only the middle point of the component is the best operation point, it can also pick up the operation object well, and it may also make the release easier (because one end of the operation object touches the operation base first), so it needs to be based on the established The mechanical model of pick-up and release is established, the finite element model of deposition pick-up and electrolytic release is established, and the simulation analysis is carried out. The established force model is further revised according to theoretical analysis theory and simulation simulation, so as to find out the force model under reliable and non-destructive conditions. Optimum operating angle, operating point, and the shape of the most favorable microelectrode, based on the simulation results, the microelectr...

specific Embodiment 3

[0020] Since the deposition through the salt solution is greatly affected by the humidity, temperature, solution concentration and applied voltage, once the operating conditions are not satisfied, it is easy to cause precipitation. Once there is salt precipitation, it will lead to the failure of the release, so In actual operation, it is first necessary to find out the parameters that have no salt precipitation and can be deposited at a faster speed based on theoretical analysis and actual operation. In addition, the proper height of micro-metal deposition is related to the reliable pick-up of micro-components and the efficiency of manipulation. Therefore, according to the reasonable shape and size of the drawn microelectrode, through the established operation mechanics model, calculate the minimum height of the micro metal column required for reliable pickup and deposition, and then communicate with the electrometer through the Labview host computer program to obtain the depos...

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Abstract

The invention takes a new method of researching micro-component reliable and nondestructive operation as a goal, research is carried out on a micro-component picking and releasing theory and method based on an electrochemical theory, a microelectrode manufacturing technology and other key technologies. According to the method, first, micro-acting force, needing to be overcome when a tubular microelectrode is utilized to reliably pick a micro-component through electrochemical deposition and nondestructively and accurately release the micro-component through electrolysis, is analyzed, and stressmodels during picking and releasing are established; based on the theoretical models, finite element analysis is performed on the operation process of the micro-component, an optimal operation angle,an optimal operation point and a microelectrode shape most beneficial for operation under a nondestructive condition are found out, and the microelectrode is prepared; a condition for fastest deposition without precipitation is found out, the relation between currents and all parameters during deposition picking and electrolysis releasing is acquired, and optimal picking and releasing time for efficient and nondestructive operation is obtained; and last, an electrochemical micro-operation platform is set up, experiment operation is performed on the micro-component represented by a micro-Cu line and a micro-Ag line, and the proposed theory and method are corrected and verified.

Description

technical field [0001] The invention belongs to micro-nano operation, and in particular relates to a design scheme for reliable and non-destructive operation of micro-components based on electrochemistry. Background technique [0002] In recent years, the rapid development of microelectronics technology and traditional ultra-precision processing methods has led to a rapid development of micro / nano manufacturing technology. Micro / nano manufacturing technology has become a symbol to measure a country's manufacturing level, representing the development of manufacturing science. Forefront. Micromanipulation is one of the key technologies of micromanufacturing, and it plays an increasingly important role in the manufacture and controllable production of micron-scale functional devices / products. Micro-manipulation is the manipulation of push / pull, pick-up / release, positioning, and orientation of micro-scale structures and devices by applying external field energy or force on the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/50G06F19/00
CPCG06F30/23G16C20/10
Inventor 李东洁王倩倩彭怀宇
Owner HARBIN UNIV OF SCI & TECH
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