Intracranial pressure sensor, detection equipment and making method
A technology for detecting equipment and internal pressure, applied in pressure sensors, intracranial pressure measurement, sensors, etc., can solve problems such as distortion of measurement results, bleeding, etc., and achieve the effect of small pushing effect, thin thickness, and small volume
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[0052] Figure 4 A schematic flow diagram of the preparation method provided in the present disclosure.
[0053] In yet another exemplary embodiment of the present disclosure, as Figure 4 As shown, a preparation method is also provided, using a MEMS processing technology, including: Step A: depositing Parylene on two glass substrates respectively to form two flexible wrapping layers 14; Step B: forming one of the flexible wrapping layers 14 The first electrode layer 12, the second electrode layer 13 is formed on the other flexible wrapping layer 14; Step C: the first electrode layer 12 and the second electrode layer 13 are oppositely arranged, and the pressure sensitive layer 11 is formed therein; Step D Step E: electrically connect the fixed inductor 20 and the first electrode layer 12 through the wire hole 141 to form an LC oscillating circuit to obtain the intracranial pressure sensor provided by the present disclosure .
[0054] In the present disclosure, step C includ...
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