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Cleaning method for ceramic chip for glow discharge mass spectrometry equipment

A technology for glow discharge mass spectrometry and ceramic sheets, which is applied in the directions of cleaning methods, cleaning methods and utensils, chemical instruments and methods using liquids, etc., can solve the problems of low detection accuracy and detection efficiency of glow discharge mass spectrometry, and improve the The effect of detection accuracy and detection efficiency, reduction of impurity residues, and improvement of removal effect

Inactive Publication Date: 2018-06-29
KONFOONG MATERIALS INTERNATIONAL CO LTD
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AI Technical Summary

Problems solved by technology

[0004] However, the detection accuracy and detection efficiency of the prior art glow discharge mass spectrometry are low

Method used

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  • Cleaning method for ceramic chip for glow discharge mass spectrometry equipment
  • Cleaning method for ceramic chip for glow discharge mass spectrometry equipment
  • Cleaning method for ceramic chip for glow discharge mass spectrometry equipment

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Embodiment Construction

[0029] It can be seen from the background technology that the detection accuracy and detection efficiency of glow discharge mass spectrometry need to be improved. Analyze the reasons for this:

[0030] In the glow discharge mass spectrometry equipment, there are two ceramic sheets separated and arranged in parallel, and the ceramic sheets are located between the sample to be tested and the glow discharge ion source (GD source); in the glow discharge mass spectrometry equipment, the sample to be tested One side is the negative pole, and the other side of the glow discharge ion source is the positive pole. The ceramic sheet is used for insulation, that is, to isolate the positive pole and the negative pole, so as to prevent direct contact between the positive pole and the negative pole, thereby avoiding short circuit phenomenon.

[0031] Wherein, the shape of the ceramic sheet is circular, that is, the center of the ceramic sheet has a through hole. During the detection process ...

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Abstract

The invention provides a cleaning method for a ceramic chip for glow discharge mass spectrometry equipment. The cleaning method comprises the following steps: providing the ceramic chip for the glow discharge mass spectrometry equipment; carrying out a first cleaning process on the ceramic chip; and carrying out a second cleaning process on the ceramic chip after the first cleaning process, wherein the second cleaning process comprises an ultrasonic cleaning process; and carrying out a drying process on the ceramic chip at a preset temperature after the second cleaning process. The first cleaning process is mainly used for removing metal impurities on the surface of the ceramic chip, the ceramic chip is provided with many micropores, and the impurities (such as metal dissolved matters after the first cleaning process) are easily adsorbed in the micropores, therefore, the residual impurities in the micropores after the first cleaning process can be effectively removed through the ultrasonic cleaning process; and moreover, during the drying process at the preset temperature, the residual impurities with low melting points in the micropores can be further evaporated, so that the impurity removal effect on the ceramic chip is improved, the impurity residue of the ceramic chip is reduced, and then the detection accuracy for glow discharge mass spectrometry is improved, and the detection efficiency for the glow discharge mass spectrometry is increased.

Description

technical field [0001] The invention relates to the field of elemental analysis, in particular to a method for cleaning ceramic sheets used in glow discharge mass spectrometry equipment. Background technique [0002] Glow Discharge Mass Spectrometry (GDMS) is currently the most effective method for purity analysis and impurity composition analysis of high-purity solid conductive materials. Glow discharge mass spectrometry is an analytical method that uses a glow discharge source as an ion source to connect with a mass spectrometer for mass spectrometry analysis. It has the advantages of high sensitivity, low detection limit, and simultaneous analysis of more than 70 impurity elements. Since glow discharge mass spectrometry can directly inject solid samples, it is more and more widely used in the analysis of high-purity metals, alloys and other materials. [0003] The glow discharge mass spectrometer consists of two parts: a glow discharge ion source (GD source) and a mass s...

Claims

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Application Information

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IPC IPC(8): B08B3/08B08B3/12F26B3/00F26B5/04
CPCB08B3/08B08B3/12F26B3/00F26B5/04
Inventor 姚力军潘杰相原俊夫王学泽陈胜洁
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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