Device for nondestructively detecting resistivity of silicon wafer by terahertz and application method of device
A non-destructive testing and terahertz detector technology, applied in the terahertz field, can solve problems such as many equipment links, unsuitable silicon wafer sample census, complex circuit design, etc., and achieve the effect of improving yield and quality
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[0023] Example 1
[0024] Such as figure 1 As shown, a device for terahertz nondestructive testing of silicon chip resistivity includes a terahertz radiation source 1, a collimated beam expanding system 2, at least one sample stage 3 that can move in parallel, a terahertz detector 4, a computer 5, and a A mechanical sucker 6 for grabbing silicon wafers, and a rework wafer collection box 7. The terahertz radiation source 1 is preferably a terahertz quantum cascade laser with a frequency of 4.3 THz, which is arranged at the bottom of the device and radiates terahertz waves vertically upward. The collimated beam expanding system 2 is preferably a Galileo type collimated beam expanding system, which is arranged above the terahertz radiation source 1. The sample stage 3 is preferably a sample stage with an aperture of 3 cm that can move horizontally in one direction, and the number is multiple, which is arranged above the collimating beam expanding system 2. The terahertz detector ...
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