One-dimensional X-ray multilayer film waveguide structure and its preparation method
A technology of a waveguide structure and a multi-layer film is applied to the field of a one-dimensional X-ray multi-layer film waveguide structure and its preparation, which can solve the problems of low transmittance and X-ray loss, and achieves guaranteed transmittance, improved focus signal-to-noise ratio, Ensure the concentrated effect of X-ray intensity
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[0049] The above molybdenum / carbon aperiodic multilayer film was prepared by using DC magnetron sputtering technology (Wang Fengli, Wang Zhanshan, Zhang Zhong, Wu Wenjuan, Wang Hongchang, Zhang Shumin, Qin Shuji, Chen Lingyan, 13 (2005) 28-33), ( Xu Yao, Wang Zhanshan, Xu Jing, Zhang Zhong, Wang Hongchang, Zhu Jingtao, Wang Fengli, Wang Bei, Qin Shuji, Chen Lingyan, 15 (2007) 1838-1843). Molybdenum / carbon aperiodic multilayer film samples were obtained by alternately depositing molybdenum thin films and carbon thin films on germanium substrates.
[0050] After the deep processing of the molybdenum / carbon non-periodic multilayer film, the X-ray multilayer film waveguide is prepared. The steps are as follows, see attached figure 2 , step A, further processing the obtained multilayer film sample, and coating the sample film with an anti-electron beam film; step B, using electron beam etching (E-beam) to etch a fixed width Lc at a specific position; step C , use ion beam etchin...
Embodiment 1
[0058] Firstly, the relationship between the waveguide emission phase and the thickness of a single conducting layer is solved. Set the X-ray multilayer film waveguide to work at 19.9 keV energy, according to the calculation method of X-ray propagation in a single channel (C. Fuhse, T. Salditt, Physica B, 357 (2005) 57-60), through the X Solving the Helmholtz equation of the ray at the entrance of the waveguide, the relationship formula between the propagation constant β and the thickness d of the guiding layer is obtained, , where k0 is the wave vector in vacuum, n1 is the refractive index of the carbon film, and ξ is the eigenvalue of the Helmholtz equation. The Taylor formula is used to expand this formula to obtain the relationship between the small amount of thickness Δd and the small amount of propagation constant Δβ.
[0059]
[0060] in is the waveguide parameter, n1 is the refractive index of the carbon film, n2 is the refractive index of the molybdenum film, ...
Embodiment 2
[0068] Firstly, the relationship between the waveguide emission phase and the thickness of a single conducting layer is solved. Set the X-ray multilayer film waveguide to work at 19.9 keV energy, according to the calculation method of X-ray propagation in a single channel (C. Fuhse, T. Salditt, Physica B, 357 (2005) 57-60), through the X Solving the Helmholtz equation of the ray at the entrance of the waveguide, the relationship formula between the propagation constant β and the thickness d of the guiding layer is obtained, , where k0 is the wave vector in vacuum, n1 is the refractive index of the carbon film, and ξ is the eigenvalue of the Helmholtz equation. The Taylor formula is used to expand this formula to obtain the relationship between the small amount of thickness Δd and the small amount of propagation constant Δβ.
[0069]
[0070] in is the waveguide parameter, n1 is the refractive index of the carbon film, n2 is the refractive index of the molybdenum film, ...
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