Flexible pressure sensor chip based on 3D printing technology and production method thereof

Abstract

The invention provides a flexible pressure sensor chip based on the 3D printing technology and a production method thereof. The chip comprises a flexible upper pole board, the flexible upper pole board is in contact with a flexible lower pole board where a miniature pyramid array is evenly arranged, flexible membrane electrodes are produced on the contact surfaces of the flexible upper pole boardand the flexible lower pole board, and the flexible membrane electrodes on the flexible upper pole board and the flexible lower pole board are connected with an external circuit through wires respectively. According to the production method, the flexible upper pole board and the flexible lower pole board are obtained through 3D printing, and cleaning is conducted; conductive adhesive is adopted toadhere the wires closely to the flexible upper pole board and the flexible lower pole board, and solidification is conducted; the flexible upper pole board and the flexible lower pole board are subjected to oxygen plasma treatment, a layer of a PEDOT:PSS solution infiltrates, and baking is conducted to complete production of the flexible membrane electrodes; polyimide insulating tape is used forsticking the flexible upper pole board and the flexible lower pole board together, and meanwhile, the side surface gaps between the flexible upper pole board and the flexible lower pole board are sealed. The flexible pressure sensor chip based on the 3D printing technology and the production method thereof have the advantages that the processing cost is low, the processing cycle is short, production is simple and convenient, material selections are diversified, and the structure is integrated and the like.

Description

technical field [0001] The invention belongs to the field of additive manufacturing and sensor technology, and in particular relates to a flexible pressure sensor chip based on 3D printing technology and a manufacturing method thereof. Background technique [0002] 3D printing belongs to additive manufacturing technology, which is a technology that solidifies liquid or powder particles layer by layer under computer control to realize the construction of three-dimensional objects. In recent years, it has been more and more widely commercialized in the production of components in the fields of construction, automobiles, aerospace, and medicine. The materials used in 3D printing mainly include metals, ceramics, composite materials, polymer materials and so on. Traditional sensor manufacturing technology, taking MEMS technology as an example, has disadvantages such as difficulty in processing true three-dimensional free-form structures, difficulty in using composite functional ...

AI Technical Summary

Problems solved by technology

Traditional sensor manufacturing technology, taking MEMS technology as an example, has disadvantages such as difficulty in processing true three-dimensional free-form structures, difficulty in using composite functional materials with excellent performance, complex processing technology, low processing efficiency, and high cost.

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