The invention provides a flexible
pressure sensor chip based on the 3D printing technology and a production method thereof. The
chip comprises a flexible upper pole board, the flexible upper pole board is in contact with a flexible
lower pole board where a miniature
pyramid array is evenly arranged, flexible membrane electrodes are produced on the contact surfaces of the flexible upper pole boardand the flexible
lower pole board, and the flexible membrane electrodes on the flexible upper pole board and the flexible
lower pole board are connected with an
external circuit through wires respectively. According to the production method, the flexible upper pole board and the flexible lower pole board are obtained through 3D printing, and cleaning is conducted; conductive
adhesive is adopted toadhere the wires closely to the flexible upper pole board and the flexible lower pole board, and solidification is conducted; the flexible upper pole board and the flexible lower pole board are subjected to
oxygen plasma treatment, a layer of a PEDOT:PSS solution infiltrates, and baking is conducted to complete production of the flexible membrane electrodes;
polyimide insulating tape is used forsticking the flexible upper pole board and the flexible lower pole board together, and meanwhile, the side surface gaps between the flexible upper pole board and the flexible lower pole board are sealed. The flexible
pressure sensor chip based on the 3D printing technology and the production method thereof have the advantages that the
processing cost is low, the
processing cycle is short, production is simple and convenient, material selections are diversified, and the structure is integrated and the like.