Micro energy harvester based on polycrystalline silicon nanowire rectangular array and nano PN junction

Abstract

The micro energy harvester based on a polycrystalline silicon nanowire rectangular array and a nano PN junction of the present invention is composed of a photocell and a thermoelectric energy harvester. A ZnO film is prepared by a gel spin coating method to obtain a nano-PN junction of the photocell. The thermoelectric energy harvester is formed by a nanowire rectangular unit rectangular array. Anano thermocouple is obtained from the nanowire rectangular unit by a deep ultraviolet lithography process. Compared with a conventional thermoelectric photoelectric energy collector, the polycrystalline silicon nanowire has much lower thermal conductivity than a conventional bulk material, and has high thermoelectric conversion efficiency. The nano thermocouple pairs are interconnected by gold wires and the nanowire rectangular units are interconnected by gold wires. The energy collected by the photocell and the thermoelectric energy harvester is output through a thermoelectric output pad anda photoelectric output pad. The collected energy is ultimately stored in a rechargeable battery. The electrical energy in the rechargeable battery can supply power to wireless sensing nodes.

Description

Technical field [0001] The invention proposes a miniature energy harvester based on a polycrystalline silicon nanowire rectangular array and a nanoPN junction, which belongs to the technical field of microelectromechanical systems (MEMS). Background technique [0002] In today's society, energy harvesting is increasingly attracting people's attention. The reason is that countries around the world are vigorously developing renewable energy sources, and smaller and smaller electronic systems can operate with lower and lower energy. For example, a small device used to monitor the temperature of a room in a large building can use the tiny vibration of the building itself to obtain power. The radio frequency transceiver, especially the power amplifier in it, has a considerable amount of energy dissipated in the form of heat energy during operation, which not only causes the heating of the transceiver components, affects the normal operation of the module, but also causes a waste of en...

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Problems solved by technology

RF transceivers, especially the power amplifiers, dissipate a considerable amount of energy in the form of heat during operation, which not only causes the temperature of the transceiver components to rise, affects the normal operation of the module, but also causes a waste of energy

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