Synthetic method of trisilylamine
A technology of trisilyl amine and synthesis method, which is applied in the directions of silicon organic compounds, chemical instruments and methods, compounds of elements of Group 4/14 of the periodic table, etc. and other problems to achieve high-purity results
Active Publication Date: 2018-09-28
ZHEJIANG BRITECH CO LTD
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Abstract
The invention provides a synthetic method of trisilylamine. The preparation method comprises the following steps: using inert gas for purging a catalytic distillation tower with inert gas in advance,respectively, simultaneously and continuously adding chlorosilane and ammonia in the catalytic distillation tower from a rectifying section and a stripping section in a gaseous state for a reaction, wherein the mol ratio of chlorosilane to ammonia is 1:1.2-3, the space velocity of chlorosilane is 0.5-2/h, the reaction pressure is 0.2-1 MPa, and the reaction temperature of the distillation tower is350-420 DEG C, continuously leading the reaction products in the tower bottom out, separating the material to obtain NH4Cl, and using a widely-known impurity-removal refining technology to obtain thehigh purity trisilylamine.
Application Domain
Silicon organic compoundsChemical industry +2
Technology Topic
TrisilylamineCatalytic distillation +9
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