A Delay Phase Calibration Method for Improved α-β Scanning Method
A technology of delayed phase and scanning method, applied in the field of delayed phase calibration, can solve problems such as unqualified product quality, and achieve the effect of reducing laser spot positioning deviation, reducing reconstruction error and image distortion, and improving positioning accuracy
Inactive Publication Date: 2020-07-28
HARBIN INST OF TECH +2
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In addition, for laser processing and other technologies that require precise positioning of the spot position, problems such as unqualified product quality caused by laser positioning deviation can be avoided, and it has important guiding significance for the use of similar scanning devices with inertia
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[0020] According to a specific embodiment of the present invention, a delay phase calibration method is provided, which is used to calibrate the phase delay of the improved α-β scanning method.
[0021] Please refer to figure 1 , figure 1 The flow chart of the delay phase calibration method.
[0022] This embodiment comprises the following steps:
[0023] (a) Use the constant angular velocity α-β scanning method to complete the scanning and imaging of the orthogonal grid grating sample, that is, use the frequency f and the initial phase of 0 and π / 2 sinusoidal signals to control the galvanometer mirror system to deflect the laser beam scanning;
[0024] (b) Confirm the scanning image rotation angle θ according to the relative positional relationship between the scanned image reconstructed using the target trajectory and the CCD captured image, and convert the angle θ to radian φ, which is the delayed phase size when the frequency is f;
[0025] (c) Repeat steps (a) and (b)...
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A delay phase calibration method for an improved alpha-beta scanning method comprises steps of: performing scanning imaging on an orthogonal grid grating sample by using an alpha-beta scanning method,namely, using sinusoidal signals with the operating frequency is f and initial phases being respectively 0 and [Pi] / 2 to control a galvanometric vibrating mirror system to deflect the laser beam to scan; confirming the scanning image rotation angle [Theta] according to the relative positional relationship between the scanned image reconstructed using the target trajectory and the target image, and converting the angle value [Theta] into the radian value [Phi], wherein [Phi] is the size of the delay phase when the frequency is f; repeating the above measurement processes to obtain the delay phase size [Phi]k at different frequencies fk; and finally, according to the plurality of sets of measurement results, fitting the f-[Phi] function relationship, namely, the relationship between the scanning frequency and the phase delay function, and completing the delay phase calibration for the improved alpha-beta scanning method. The delay phase calibration method provided by the invention accurately determines the phase delay size and corrects the phase delay due to the inertia of the vibrating mirror system in advance.
Description
technical field [0001] The invention relates to the fields of beam scanning technology, laser processing technology and the like, in particular to a delayed phase calibration method for an improved α-β scanning method. Background technique [0002] The improved α-β scanning method has the advantages of making full use of the effective field of view of the optical system, expanding the scanning field of view of the confocal microscope system, improving the reliability of the galvanometer system, and prolonging the service life of the galvanometer system. It is widely used in beam scanning, microscopic imaging, laser processing and other fields. However, since the galvanometric galvanometer system is similar to a second-order low-pass inertial system, there is a motion delay in the execution of control instructions, which will cause laser spot positioning deviation. For the improved α-β scanning method, the laser spot positioning Misalignment can cause rotation or distortion ...
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IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 刘俭由小玉陈刚王宇航刘辰光谭久彬
Owner HARBIN INST OF TECH