Micro-generator based on nano-film thermocouple and superlattice photoelectric structure

Abstract

The invention provides a micro-generator based on a nano-film thermocouple and a superlattice photoelectric structure. The substrate of the micro-generator is composed of an N-type silicon wafer. A suede structure, a second silicon nitride film and a back electric field structure are manufactured on the light receiving surface of a photocell. On the upper surface of the substrate, a layer of epitaxial monocrystalline silicon thin film is covered on the superlattice structure. One part of the epitaxial monocrystalline silicon thin film is in the form of a P-type doped region, and another part of the epitaxial monocrystalline silicon thin film is in the form of an N-type doped region. A silicon dioxide layer passivation layer is deposited on the monocrystalline silicon thin film. The silicondioxide layer passivation layer is connected with the base region electrode and the emitting region electrode of the photocell. A thermopile, for realizing the main function of the thermoelectric generator, is formed by connecting a plurality of thermocouples in series. Each thermocouple is composed of an N-type polycrystalline silicon nano-film and a P-type polycrystalline silicon nano-film. Thethickness of each polycrystalline silicon nano-film is 1-100 nm. Above the thermopile, a cavity structure is manufactured through the release of a sacrificial layer. A metal plate is arranged above the cavity. A third silicon nitride film is arranged between the metal plate and the thermopile to space the metal plate from the thermopile.

Description

technical field [0001] The invention provides a micro-generator based on a nanometer film thermocouple and a superlattice photoelectric structure, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] Energy harvesting technology can be used to replace traditional batteries to power various low-power electronic devices and circuits, and is one of the current research thermoelectrics. However, a single energy harvesting method has the disadvantages of insufficient output power and being susceptible to environmental interference. In order to overcome these problems, integrating multiple energy harvesting methods is a future development trend. Among them, both light energy collection and thermal energy collection can use solid-state conversion devices. There are no moving parts, high reliability, long service life, no maintenance, and no noise during operation. The integration of thermoelectricity and photoelectricity can...

AI Technical Summary

Problems solved by technology

However, a single energy harvesting method has the disadvantages of insufficient output power and being susceptible to environmental interference. In order to overcome these problems, it is the future development trend to integrate multiple energy harvesting methods

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