Surface-enhanced Raman optical fluid chip based on long-range plasma waveguide

Abstract

The invention relates to a surface-enhanced Raman optical fluid chip based on a long-range plasma waveguide, the surface-enhanced Raman optical fluid chip comprises a coupling grating (1), a dielectric waveguide, a surface plasma waveguide, a microfluidic structure and a silicon substrate (2); the dielectric waveguide comprises a waveguide upper-cladding layer (3), a waveguide lower-cladding layer(4) and a waveguide core layer (5); the waveguide upper-cladding layer (3) is disposed on the upper surface of the waveguide core layer (5), the coupling grating (1) is distributed on the upper surface of the waveguide core layer (5), the coupling grating (1) is not in contact with the waveguide upper-cladding layer (3); the outer surfaces of the silicon substrate (2), the waveguide lower cladding layer (4) and the waveguide core layer (5) are flush, and the outer surfaces of the waveguide upper-cladding layer (3), a surface plasma waveguide core layer (9) and a microfluidic channel (8) are flush. The surface-enhanced Raman optical fluid chip based on the long-range plasma waveguide has a simple structure and a small size, and can form an array structure on a single chip to improve detection sensitivity.

Description

technical field [0001] The invention belongs to the field of optics and microfluidics, and relates to a surface-enhanced Raman optofluidic chip based on a long-distance plasma waveguide. Background technique [0002] In recent years, the combination of surface-enhanced spectroscopy and microfluidic technology is a major development trend of biochemical detection chips. Surface-enhanced Raman spectroscopy is an important optical detection method, which has the advantages of fast detection speed, less sample consumption, and no need to Sample pretreatment, high detection sensitivity, etc. Taking advantage of the small volume of the microfluidic channel, the detection of low-concentration samples can be realized, which provides an important means for biochemical detection. At present, surface-enhanced Raman spectroscopy is widely used in many fields such as biomedicine, mineral detection, food safety, and weapon research. [0003] At present, the production mechanism of optof...

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Problems solved by technology

[0003] At present, the production mechanism of optofluidic sensors based on surface-enhanced Raman spectroscopy mainly focuses on the following three aspects: First, single-point detection sensors, which increase the detection sensitivity by increasing the amount of sample molecules, cannot improve the repeatability of Raman signals; The second is the photonic crystal fiber-optic sensor, which increases the sensitivity by increasing the detection volume of the solution, but the preparation is complicated and the loading of the detection solution is difficult; the third is the traditional optical waveguide sensor, but the light wave loss is large, and it is difficult to enhance the signal strength

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