Preparation method of SiO2 antireflective film with adjustable refractive index

Abstract

The invention discloses a preparation method of a SiO2 antireflective film with an adjustable refractive index. The preparation method includes steps: simultaneously adding hexamethyldisilazane and tetraethoxysilane to a reaction solution as raw materials to synthesize SiO2 sol, and then plating a base-catalyzed SiO2 film on a substrate by employing a dip-coating method. According to the preparation method, the SiO2 film with a refractive index capable of large-range regulation and control can be further prepared, the preparation method is advantaged by simple process, high operability and fast reaction speed, the light transmittance of the prepared SiO2 antireflective film is high, and the stability is extremely excellent in a highly humid and hot environment; hexamethyldisilazane is regarded as the reaction raw material so that a microstructure of the film can be adjusted, and the regulation and control of the refractive index of the film can be realized; and when the proportion of hexamethyldisilazane is high, the mechanical strength (tension-compression strength) of the film can be effectively improved.

Description

technical field [0001] The invention relates to a SiO with adjustable refractive index 2 The invention discloses a method for preparing an anti-reflection film, belonging to the technical field of optical thin films. Background technique [0002] SiO 2 Anti-reflection coatings have been widely used in optical devices and energy fields to reduce the reflection of light. At present, the preparation methods of anti-reflection film mainly include vacuum evaporation, magnetron sputtering, sol-gel method and chemical vapor deposition method. Because the sol-gel method is simple, low in cost, and easy to combine with liquid deposition technology, this method is one of the most practical methods for preparing anti-reflection coatings. Therefore, in recent years, people have devoted themselves to the preparation of anti-reflection coatings by using the sol-gel method. Due to sol-gel SiO 2 Anti-reflection coatings have been widely studied and applied due to their excellent proper...

AI Technical Summary

Problems solved by technology

Although this film has an adjustable refractive index, the adjustment range of the packing density of the nanoparticles is small, resulting in a relatively small adjustment range of the refractive index.

Images