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Preparation method of curved-surface crystal for X-ray micro-imaging

A microscopic imaging and X-ray technology, applied in the field of inertial confinement fusion X-ray imaging, can solve the problems of difficulty in controlling the uniformity of the adhesive, the risk of deformation of the adhesive, temperature control and the control of the bonding surface, and achieves ingenious design. , long service life, easy to achieve effect

Active Publication Date: 2018-11-13
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

The above-mentioned first method has problems such as difficulty in controlling the uniformity of the adhesive, and the risk of deformation of the adhesive after long-term use, while the second method has problems such as temperature control and adhesive surface shape control.

Method used

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  • Preparation method of curved-surface crystal for X-ray micro-imaging
  • Preparation method of curved-surface crystal for X-ray micro-imaging
  • Preparation method of curved-surface crystal for X-ray micro-imaging

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Embodiment Construction

[0038] The present invention will be further described below in conjunction with embodiment and accompanying drawing.

[0039] Such as Figure 1 ~ Figure 4 Shown, a kind of surface crystal preparation method for X-ray microscopic imaging comprises the following steps:

[0040] S1: Perform directional cutting on the single crystal 1 to obtain a thick wafer 11 with a preset thickness, wherein the material of the single crystal 1 is quartz, silicon, germanium, lithium fluoride, mica, etc., and the crystal orientation angle accuracy of the directional cutting single crystal 1 is less than or equal to 0.5°, the thickness of the thick wafer 11 in this embodiment is preferably 2 mm to 3 mm, and the size can be directional cut as required.

[0041] S2: Use the X light source 4 to inspect the lattice deformation of the thick wafer 11: if unqualified, discard the thick wafer 11, and return to step S1; if qualified, proceed to the next step. Wherein, the lattice deformation detection i...

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Abstract

The invention discloses a preparation method for a curved-surface crystal for X-ray micro-imaging. The preparation method comprises the following steps of: S1: cutting in a directional mode to obtaina thick crystal plate; S2: detecting whether the thick crystal plate is qualified or not; S3: grinding the thick crystal plate to obtain a thin crystal plate; S4: detecting whether the thin crystal plate is qualified or not; S5: grinding base blank to obtain a curved-surface base; S6: detecting whether the curved-surface base is qualified or not; S7: cleaning the thin crystal plate and the curved-surface base; S8: bonding the thin crystal plate and the curved-surface base by optical cement to obtain curved-surface crystal; and S9: checking whether the curved-surface crystal is qualified or not. With the adoption of the preparation method of the curved-surface crystal for X-ray micro-imaging disclosed by the invention, the thin crystal plate is combined with the curved-surface base by an optical cement bonding way to obtain the curved-surface crystal used for X-ray micro-imaging. The combination way is molecular bonding between the thin crystal plate and the base, so that the curved-surface crystal has the advantages of being free of an adhesive, free of a gap, high in surface shape quality, stable in performance, long in service life and the like.

Description

technical field [0001] The invention belongs to the technical field of inertial confinement fusion X-ray imaging, and in particular relates to a method for preparing curved surface crystals for X-ray microscopic imaging. Background technique [0002] In the field of laser fusion, implosion physics and fluid instability need to be measured with high spatial resolution, high spectral resolution and large field of view X-ray microscopic imaging equipment. One of the main measurement methods is to use curved crystals (spherical surface Bent crystal or aspherical curved crystal) as an imaging device for X-ray microscopic imaging. [0003] One method of conventional curved surface crystal preparation is to use an adhesive method to bond the thin wafer to the curved surface base, and the other method uses high temperature bonding to bond the thin wafer to the curved surface base. The above-mentioned first method has problems such as difficulty in controlling the uniformity of the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D5/00B24B1/00G01B15/00G01B15/04G01B15/08
CPCB24B1/00B28D5/00B28D5/0058G01B15/00G01B15/04G01B15/08
Inventor 杨正华
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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