AlTiN coating and preparation method thereof

A coating and transition layer technology, applied in the field of AlTiN coating and its preparation, can solve the problems of high friction coefficient of AlTiN coating, rough surface of AlTiN coating, insufficient plasma density, etc. It is not easy to peel off and the effect of reducing the number of large particles on the surface

Inactive Publication Date: 2018-11-13
GUANGDONG UNIV OF TECH
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Problems solved by technology

However, during the deposition process of this method, since the output current of the arc ion plating is a constant value, the generated plasma density is not high enough, so the AlTiN coating

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  • AlTiN coating and preparation method thereof
  • AlTiN coating and preparation method thereof

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[0032] In order to make the purpose, features and advantages of the present invention more obvious and understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the following The described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0033] see figure 1 As shown, the present embodiment provides a method for preparing an AlTiN coating, including the following steps in sequence: step S1, cleaning the substrate; step S2, etching; step S3, depositing a Cr bombardment implant layer; step S4, process of depositing a CrN transition layer; step S5, process of depositing an A...

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Abstract

The invention discloses an AlTiN coating and a preparation method thereof. The AlTiN coating is composed of a Cr bombardment implanting layer, a CrN transition layer and an AlTiN surface function layer. The binding force of the AlTiN coating and a matrix is strong enough, the peeling-off phenomenon is not prone to being generated, and the friction coefficient is small under high temperature. The preparation method comprises a matrix cleaning procedure, an etching procedure, a Cr bombardment implanting layer deposition procedure, a CrN transition layer deposition procedure, an AlTiN surface function layer deposition procedure and a cooling procedure. In the three specific deposition procedures, the cathode pulsed arc technology is applied, and higher-density plasma can be generated during pulse discharging by adjusting the maximum value, the minimum value, the duty ratio and frequency of currents output by a pulsed arc power source; and compared with an AlTiN coating prepared by a traditional arc ion plating technology, the AlTiN coating prepared through the method has the advantages that the surface roughness of the coating is obviously reduced, the number of large particles on thesurface is obviously reduced, the film layer compactness is higher, the film-matrix binding force is higher, and the friction coefficient under the high temperature is lower.

Description

technical field [0001] The invention relates to the technical field of tool coatings, in particular to an AlTiN coating and a preparation method thereof. Background technique [0002] Tool coatings have undergone leapfrog development since the 1970s, among which the first-generation coatings represented by TiN have high hardness and wear resistance, which have significantly improved tool processing efficiency and surface quality, and have been widely used . However, the TiN coating will be oxidized when the temperature exceeds 600°C, and the hardness will decrease and the coating will fall off. Therefore, TiN coating has been unable to meet the requirements of modern cutting. [0003] Compared with TiN coating, in addition to the advantages of high hardness and oxidation temperature above 800, AlTiN coating also has the characteristics of high film-base bonding strength, small friction coefficient, low thermal conductivity, etc., especially suitable for high-speed cutting ...

Claims

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Application Information

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IPC IPC(8): C23C14/02C23C14/06C23C14/16C23C14/32
CPCC23C14/022C23C14/024C23C14/025C23C14/0641C23C14/16C23C14/325
Inventor 王启民李季飞张腾飞刘辞海
Owner GUANGDONG UNIV OF TECH
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