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Mask blank, mask assembly, display panel and display device

A mask substrate and display panel technology, which is applied to electrical components, electrical solid-state devices, semiconductor devices, etc., can solve the problems of circular edge color mixing, affecting product evaporation yield and production capacity, etc.

Active Publication Date: 2021-01-26
BOE TECH GRP CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, double-layer masks are prone to rounded edge color mixing (e.g. figure 1 Shown in the F area) bad problem, which also seriously affects the vapor deposition yield and production capacity of the product

Method used

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  • Mask blank, mask assembly, display panel and display device
  • Mask blank, mask assembly, display panel and display device
  • Mask blank, mask assembly, display panel and display device

Examples

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Embodiment Construction

[0049] The following describes the embodiments of the present invention in detail, and those skilled in the art will understand that the following embodiments are intended to explain the present invention, and should not be regarded as limiting the present invention. Unless otherwise specified, those skilled in the art can carry out according to commonly used techniques or conditions in this field or according to the product specification if no specific technique or condition is explicitly described in the following examples.

[0050] In one aspect of the invention, the invention provides a mask blank.

[0051] According to an embodiment of the present invention, refer to Figure 4~5, the mask substrate 100 includes a half-etched region H and a non-etched region U, the non-etched region U is arranged around the half-etched region H, and the half-etched region H has a plurality of openings 110 distributed in an array, and any one The minimum distance d′ from the opening 110 to...

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Abstract

The invention provides a mask substrate, a mask assembly, a display panel and a display device. The mask substrate includes a half-etched area and a non-etched area, the non-etched area is arranged around the half-etched area, and the half-etched area has a plurality of openings arranged in an array, and any opening to the non-etched area The minimum distance is not less than the distance between any two adjacent openings. In the mask substrate proposed by the present invention, the distance from the opening close to the non-etching region to the non-etching region is lengthened, so that the position where the mask substrate and mask strips are prone to wrinkles in a stretched state is far away from the opening, ensuring While improving the uniformity of the mask substrate, it will also reduce the interference effect of the deformation of the mask substrate under stretching on the mask strip, thereby improving the yield rate of the evaporation product produced by the mask component.

Description

technical field [0001] The present invention relates to the technical field of flat panel display manufacturing, and in particular, the present invention relates to a mask substrate, a mask assembly, a display panel and a display device. Background technique [0002] Flat-panel displays include liquid crystal display (LCD), organic light-emitting diode display (OLED), plasma display (PDP) and electronic ink display, etc. Among them, OLED display has light and thin, low power consumption, high contrast, high color gamut, and can realize flexible display And other advantages, thus becoming the development trend of the next generation of display. The OLED display can be divided into passive matrix (PM) OLED and active matrix (AM) OLED, and the implementation of AMOLED display is divided into low temperature polysilicon (LTPS) backplane + fine metal mask (FMM) method and oxide (Oxide) ) backplane + white (W) OLED + color film. The first method is mainly used in small-sized pan...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/24H01L51/00H10K99/00
CPCC23C14/042C23C14/24H10K71/164H10K71/166
Inventor 张健黄俊杰王震李冬伟
Owner BOE TECH GRP CO LTD
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