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A coating process of solar polycrystalline cell sheet

A cell and solar technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problem that the passivation of silicon dioxide and silicon nitride films cannot meet the requirements of efficiency improvement, the passivation quality is poor, and the passivation effect is not good. It can achieve excellent passivation effect, improve minority carrier lifetime, and improve conversion efficiency.

Inactive Publication Date: 2018-12-28
HENGDIAN GRP DMEGC MAGNETICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] With the improvement of cell conversion efficiency requirements, traditional silicon dioxide and silicon nitride film passivation can no longer meet the requirements for efficiency improvement
Silicon dioxide has poor passivation effect on P-type silicon, and its UV stability is poor. Silicon nitride contains a large amount of fixed positive charges, which will form an inversion layer on the surface, and the passivation quality is not good.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] A coating process for solar polycrystalline cells, comprising the following steps:

[0030] The first step is to insert the etched cell into the graphite boat and send it into the furnace tube;

[0031] In the second step, after the furnace door is closed, the temperature from the furnace mouth to the furnace tail is raised to 450°C, and the heating time is 150s. At the same time, the vacuum is kept on, and the pressure is maintained at 0mtorr;

[0032] The third step, the pre-nitrogen flow detection step is maintained for 15s, the temperature is kept at 450°C, nitrous oxide is introduced at 4000sccm, and the pressure is maintained at 1500mtorr;

[0033] The fourth step, the nitrous oxide flow detection step is maintained for 130s, the temperature is kept at 450°C, 4000 sccm of nitrous oxide is introduced, and the pressure is maintained at 1500mtorr;

[0034] The fifth step, the evacuation step time is maintained at 30s, the pressure is evacuated to 0mtorr, and the tem...

Embodiment 2

[0051] A coating process for solar polycrystalline cells, comprising the following steps:

[0052] The first step is to insert the etched cell into the graphite boat and send it into the furnace tube;

[0053] In the second step, after the furnace door is closed, the temperature from the furnace mouth to the furnace tail is raised to 460°C, and the heating time is 180s.

[0054] The third step, the pre-nitrogen flow detection step is maintained for 15s, the temperature is kept at 460°C, nitrous oxide is introduced at 4200sccm, and the pressure is maintained at 1700mtorr;

[0055] The fourth step, the nitrous oxide flow detection step is maintained for 150s, the temperature is maintained at 460°C, 4200 sccm of nitrous oxide is introduced, and the pressure is maintained at 1700mtorr;

[0056] The fifth step, the time of the evacuation step is maintained at 60s, the pressure is evacuated to 25mtorr, and the temperature is maintained at 460°C;

[0057] The sixth step, the ammonia ...

Embodiment 3

[0072] A coating process for solar polycrystalline cells, comprising the following steps:

[0073] The first step is to insert the etched cell into the graphite boat and send it into the furnace tube;

[0074] In the second step, after the furnace door is closed, the temperature from the furnace mouth to the furnace tail is raised to 500°C, and the heating time is 220s. At the same time, the vacuum is kept on and the pressure is maintained at 50mtorr;

[0075] The third step, the pre-nitrogen flow detection step is maintained for 15s, the temperature is kept at 500°C, nitrous oxide is introduced at 4500sccm, and the pressure is maintained at 1700mtorr;

[0076] The fourth step, the nitrous oxide flow detection step is maintained for 180s, the temperature is maintained at 500°C, 4500 sccm of nitrous oxide is introduced, and the pressure is maintained at 1700mtorr;

[0077] The fifth step, the time of the evacuation step is maintained at 50s, the pressure is evacuated to 50mtor...

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PUM

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Abstract

The invention discloses a coating process of a solar cell sheet, which mainly comprises the following steps of: feeding a boat, preparing a reaction, coating, vacuumizing, back-pressing and retreatingthe boat. A silicon nitride oxide film is applied on the silicon nitride film to prolong the minority carrier lifetime, improve the open circuit voltage and short circuit current of the battery, andthus improve the conversion efficiency of the battery. Compared with silicon nitride film, silicon oxynitride film has better passivation effect because its properties are between silicon nitride andsilicon dioxide.

Description

technical field [0001] The invention belongs to the technical field of polycrystalline solar cells, and in particular relates to a coating process for polycrystalline solar cells. Background technique [0002] With the improvement of cell conversion efficiency requirements, traditional silicon dioxide and silicon nitride film passivation can no longer meet the requirements for efficiency improvement. Silicon dioxide has a poor passivation effect on P-type silicon, and its UV stability is poor. A large amount of fixed positive charges inside silicon nitride will form an inversion layer on the surface, and the passivation quality is not good. The silicon oxynitride film is a material between the two, and its electrical and optical properties are between the two. By changing its composition and adjusting the gas flow ratio to form a nitrogen-rich silicon oxynitride film, the structural performance tends to The silicon nitride film retains some of the advantages of silicon diox...

Claims

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Application Information

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IPC IPC(8): H01L21/314H01L31/18H01L31/0216
CPCH01L21/0214H01L21/02274H01L31/02167H01L31/02168H01L31/1804Y02E10/547Y02P70/50
Inventor 葛剑杰贾松燕任永伟厉文斌钱异军
Owner HENGDIAN GRP DMEGC MAGNETICS CO LTD
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