A coating process of solar polycrystalline cell sheet
A cell and solar technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problem that the passivation of silicon dioxide and silicon nitride films cannot meet the requirements of efficiency improvement, the passivation quality is poor, and the passivation effect is not good. It can achieve excellent passivation effect, improve minority carrier lifetime, and improve conversion efficiency.
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[0028] Example 1
[0029] A coating process for a solar polycrystalline cell, comprising the following steps:
[0030] The first step is to insert the etched cells into the graphite boat and send them into the furnace tube;
[0031] The second step, after the furnace door is closed, the temperature from the furnace mouth to the furnace tail is raised to 450 ° C, the heating time is 150 s, and the vacuum is always turned on, and the pressure is maintained at 0 mtorr;
[0032] The third step, the pre-laughing gas flow detection step is maintained for 15s, the temperature is maintained at 450 ℃, 4000sccm of nitrous oxide is introduced, and the pressure is maintained at 1500mtorr;
[0033] The fourth step, the maintenance time of the nitrous oxide flow detection step is 130s, the temperature is maintained at 450 ° C, 4000sccm of nitrous oxide is introduced, and the pressure is maintained at 1500mtorr;
[0034] The fifth step, the evacuation step time is maintained at 30s, the pr...
Example Embodiment
[0050] Example 2:
[0051] A coating process for a solar polycrystalline cell, comprising the following steps:
[0052] The first step is to insert the etched cells into the graphite boat and send them into the furnace tube;
[0053] The second step, after the furnace door is closed, the temperature from the furnace mouth to the furnace tail is raised to 460 ° C, the heating time is 180 s, and the vacuum is always turned on, and the pressure is maintained at 25 mtorr;
[0054] The third step, the maintenance time of the pre-laughing gas flow detection step is 15s, the temperature is maintained at 460 ℃, the nitrous oxide is fed at 4200sccm, and the pressure is maintained at 1700mtorr;
[0055] The fourth step, the maintenance time of the nitrous oxide flow detection step is 150s, the temperature is maintained at 460°C, the nitrous oxide is fed at 4200sccm, and the pressure is maintained at 1700mtorr;
[0056] The fifth step, the evacuation step time is maintained at 60s, the p...
Example Embodiment
[0071] Example 3:
[0072] A coating process for a solar polycrystalline cell, comprising the following steps:
[0073] The first step is to insert the etched cells into the graphite boat and send them into the furnace tube;
[0074] The second step, after the furnace door is closed, the temperature from the furnace mouth to the furnace tail is raised to 500 ° C, the heating time is 220 s, and the vacuum is always turned on, and the pressure is maintained at 50 mtorr;
[0075] The third step, the pre-laughing gas flow detection step is maintained for 15s, the temperature is maintained at 500 ℃, 4500sccm of nitrous oxide is introduced, and the pressure is maintained at 1700mtorr;
[0076] The fourth step, the maintenance time of the nitrous oxide flow detection step is 180s, the temperature is maintained at 500°C, the nitrous oxide is fed at 4500sccm, and the pressure is maintained at 1700mtorr;
[0077] The fifth step, the evacuation step time is maintained at 50s, the press...
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