A measurement method based on nanometer metal hole array

A technology of nano metal and measurement method, applied in the direction of volume measurement instrument/method, measurement device, nanotechnology, etc., to achieve the effect of mass production cost, less equipment and simple process

Active Publication Date: 2019-12-27
XIAMEN UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Aiming at the deficiencies of the prior art, the present invention provides a measurement method based on a nanometer metal hole array, which solves some of the existing background technical problems

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  • A measurement method based on nanometer metal hole array
  • A measurement method based on nanometer metal hole array
  • A measurement method based on nanometer metal hole array

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Embodiment 1

[0028] Embodiment 1: Select a silicon wafer polished on one side as the substrate, and obtain a nanometer metal hole array structure on the substrate by nanoimprinting, and deposit 500 nm of Au on the substrate by electron beam evaporation, so that on the substrate Au nanometer metal hole array structure is obtained on the surface.

[0029] First, the method of controlling variables is used to explore the effect of the depth of nano-metal pores on the reflectance spectrum. Here, the period of the nano-metal hole is selected as 500 nm, and the radius of the nano-metal hole is 125 nm. When simulating with COMSOL, the depth of the nano-metal hole is changed from 10nm to 496nm every 2nm and the parameters are scanned. After processing the obtained data results, it can be obtained: when the depth of the nano-metal hole is less than 50nm, the reflection spectrum has no Obvious resonance point. This is because the nano-metal pores are very shallow at this time, which is equivalent ...

Embodiment 2

[0030]Embodiment 2: After investigating the effect of the period radius depth of the nano-metal hole when no liquid is contained in the nano-metal hole, the effects of different sizes of the nano-metal hole in measuring the liquid volume are discussed in detail next. Take the values ​​of the radius r as 30nm, 90nm, 105nm, 120nm, 150nm, and 190nm. Here, the liquid in the nano-metal hole is selected as water, so that the water depth in the nano-metal hole changes from 2nm to 150nm, and one is taken every 2nm. value. After processing the reflection spectrum obtained by changing the water depth at different radii, it was found that the resonance point of the reflection spectrum basically does not change with the increase of the water depth, which indicates that the radius of the nano-metal hole is too small, and the nano-metal hole structure does not measure the liquid volume. Effect. Similarly, if the radius of the nano-metal hole is too large, there is also no measurement effec...

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Abstract

The invention discloses a measuring method based on a nano metal hole array. The method comprises the following steps: step 1, impressing a series of periodically uniformly distributed nano metal holes on a metal film by using a nanoimprint lithography; step 2, selecting a suitable nano metal hole array structure, wherein the thickness of the metal film is 500nm; step 3, adopting vertical incidentlight to irradiate, causing a surface plasmon effect of the nano metal holes, and limiting the incident light into the nano metal holes, thereby locally enhancing the electric field intensity in thenano metal holes; step 3, quantitatively analyzing the change of the plasmon resonance wavelength through a spectrometer; step 4, measuring the volume of liquid in the nano metal holes through a corresponding relationship between the liquid volume and a spectral line of a reflection spectrum; and step 5, quantitatively analyzing a measurement effect by adopting a quality factor. The measuring method based on nano metal hole array provided by the invention has the characteristics of being non-destructive, non-invasive and non-marked and the like.

Description

technical field [0001] The invention relates to the technical field of nanometer cylinders, in particular to a measurement method based on nanometer metal hole arrays. Background technique [0002] In nanotechnology applications such as the synthesis of nanocrystals, drug delivery in nanosystems, nanoscale analytical chemistry, and nanofluid dynamics, quantitative analysis of nanoscale liquid volumes is crucial for the application of these technologies. Therefore, the precise measurement and control of nanoscale liquid volume has attracted extensive attention of researchers in the field of science and technology. Traditional scanning electron microscopy and atomic force microscopy and other microscopic measurement methods cannot measure the size of nanoscale liquids. Therefore, environmental scanning electron microscopy and cryo-electron microscopy have been developed to characterize nanoscale liquid samples. However, both electron microscopy techniques have the disadvantag...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01F19/00B82Y35/00
CPCB82Y35/00G01F19/00
Inventor 朱锦锋陈玺钊王正瑛朱衫陈焕阳
Owner XIAMEN UNIV
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