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A surface wave plasma generate device for a cylinder

A plasma, cylindrical surface technology, applied in the direction of plasma, electrical components, etc., can solve the problems of unstable structure, complexity, large loss, etc., and achieve the effect of adjustable parameters, considerable size, and small loss

Active Publication Date: 2019-01-11
九未实业(上海)有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This invention adopts the coupling technology of waveguide and antenna, but this technology has the disadvantages of large loss in the coupling process, intermittent unstable state and complex structure

Method used

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  • A surface wave plasma generate device for a cylinder
  • A surface wave plasma generate device for a cylinder
  • A surface wave plasma generate device for a cylinder

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Embodiment Construction

[0030] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0031] The cylindrical surface wave plasma generation device includes a high-frequency power supply 1, an impedance adjustment unit 2, an energy transmission waveguide 3, a waveguide converter 4 and a cylindrical slotted waveguide 5 connected in sequence, see figure 1 , the outer wall of the cylindrical slotted waveguide 5 is nested with a dielectric tube 6, and the material of the dielectric tube 6 is one of quartz glass, Pyrex glass or alumina ceramics. A reaction chamber 10 is sheathed on the periphery of the dielectric tube 6, a vacuum cavity is formed between the outer wall of the dielectric tube 6 and the inner wall of the reaction chamber 10, and the cylindrical slotted waveguide 5 is provided with multiple slots. seam.

[0032] The high-frequency power source is preferably a microwave source of 2.45 GHz. The parameters of 2.45 GHz ar...

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Abstract

A surface wave plasma generate device comprises a high-frequency power supply (1) connected in turn, an impedance adjusting unit (2), an energy transmission waveguide (3), a waveguide converter (4) and a cylindrical slotted waveguide (5), a dielectric tube (6) is nested on the outer wall of the cylindrical slotted waveguide (5), the cylindrical slotted waveguide (5) is provided with a plurality ofslots, the microwave forms a conductive current on the inner wall surface of the cylindrical slotted waveguide (5), which is cut off at the slit and passes through the slit in the form of a displacement current which radiates an electric field formed at the slit into the direction of the dielectric tube (6) to ionize the working gas near the dielectric tube and generate plasma around the outer wall of the dielectric tube (6). Compared with the prior art, the high-density plasma generated by the invention has the advantages of more homogeneity, stability, more activated groups and the like.

Description

technical field [0001] The invention relates to the field of microwave technology and antenna design, in particular to a cylindrical surface wave plasma generating device. Background technique [0002] As the "fourth state of matter", plasma is widely used in modern industries, such as the preparation of carbon nanotubes, the processing of semiconductors, and the surface modification of materials. It is of great concern that compared with other plasma sources, the surface wave plasma source has the ability to realize electrodeless discharge, no magnetic field, simple equipment structure, and can ensure that the generated plasma is more pure. [0003] Whether it is a planar surface wave or a cylindrical surface wave, the size of the surface wave plasma is related to the size of the dielectric tube, and the size of the dielectric tube is related to the size of the waveguide, but the size of the waveguide often determines the transmission mode. There are many propagation modes...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/46
CPCH05H1/46H05H1/4615H05H1/4622
Inventor 昌锡江徐涛朱登京王廷亦方玲
Owner 九未实业(上海)有限公司
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