Ceramic substrate material and preparation method thereof

Abstract

The invention discloses a ceramic substrate material and a preparation method thereof, and belongs to the technical field of electronic information functional materials and devices. The ceramic substrate material is prepared by ball milling and mixing a ceramic phase material and a doped glass phase material, and carrying out roll forming and sintering, and comprises a ceramic phase MgSiO3 and doped phase Mg-Al-Si glass; and the mass percentage contents of the components are as follows: 90-99% of MgSiO3 and 1-10% of Mg-Al-Si glass. Compared with similar ceramic substrate materials in the priorart, the ceramic substrate material provided by the invention has excellent properties of high ceramic forming density rho of more than 2.8g / cm<3>, low thermal conductivity (less than 3.0w / m.k), highinsulation resistance (more than 10<14>omega.cm), and high bending strength (more than 180MPa). The ceramic substrate material provided by the invention is simple in process and good in production stability, which makes it possible to stably produce a magnesium silicate ceramic substrate material in batches.

Description

technical field [0001] The invention belongs to the technical field of electronic information functional materials and devices, and specifically relates to a ceramic substrate material and a preparation method thereof Background technique [0002] In the continuous development of integrated circuits (IC) and surface mount technology (SMT), the requirements for the performance of substrate materials are also getting higher and higher. Traditional alumina can no longer meet the requirements. In particular, with the high speed of IC chips, the delay of wiring patterns to transmission signals is becoming more and more serious. This signal delay is closely related to the dielectric constant of the materials around the wiring patterns. The dielectric constant of the substrate material is high, even if the circuit design is improved, it cannot fully meet the application requirements of high-speed signal transmission and complete signal at high frequency, because the high dielectric...

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Problems solved by technology

[0005] Common magnesia porcelain is mostly made of mineral materials, with many miscellaneous phase components, and MgSiO 3 There will be a phase change, MgSiO 3 There are four isomers, Proto-enstatile (enstatite) is a high-temperature form, has good mechanical strength and low thermal expansion coefficient, and is commonly used on circuit substrates; Ortho-enstatile (orthogonal pyroxene), Clino- enstaticile (monoclinic pyroxene) and Monoclinic amphibole (monoclinic amphibole) are MgSiO 3 low-temperature form; orthorhombic pyroxene (α-MgSiO 3 ) and monoclinic pyroxene (β-MgSiO 3 ) is interactively transformed, compared to Mg 2 SiO 4 Ceramic, MgSiO 3 Ceramics have a lower dielectric constant, but have poor sinterability and are difficult to densify

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