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A method for preparing field emission single tip by stepping motor assisted electrochemical corrosion

A stepping motor, electrochemical technology, applied in the manufacture of electrode systems, discharge tubes/lamps, circuits, etc., can solve the difficulty of single-tip processing with small curvature radius, low processing efficiency, difficulty in controlling the size of single-tip curvature radius, etc. problems, to achieve the effects of easy mass production, shortened production cycle and high degree of automation

Active Publication Date: 2020-10-13
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a field emission cathode, the single tip of the emitter is required to have a small radius of curvature, but the chemical stability and hard and brittle characteristics of single crystal rare earth hexaboride make it extremely difficult to process the single tip with a small curvature radius. Currently, the commonly used method is wet etching. method, high temperature oxygen reaction ion (RIE) corrosion method, and electrochemical corrosion method, but the single-tip curvature radius obtained by these processing methods is difficult to control and the processing efficiency is low.

Method used

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  • A method for preparing field emission single tip by stepping motor assisted electrochemical corrosion
  • A method for preparing field emission single tip by stepping motor assisted electrochemical corrosion
  • A method for preparing field emission single tip by stepping motor assisted electrochemical corrosion

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] Cut the rare earth hexaboride single crystal into cuboid rods, grind the surface with sandpaper and mechanically polish it to a scratch-free state, put it in an acetone solution for 10 minutes and wash it with alcohol to remove the oily impurities on the surface, and finally dry it to obtain a corroded single crystal Material stick.

Embodiment 2

[0018] The corrosion solution is hydrochloric acid: alcohol: deionized water=1:20:20 (volume ratio), wherein, the volume percentage concentration of hydrochloric acid is 5%, and the volume percentage concentration of alcohol is 95%, and then the single crystal rod is clamped in At the sample holder of the corrosion equipment, the sample is immersed in the corrosion solution, and placed in the stepping motor-assisted electrochemical corrosion equipment for electrochemical corrosion. The corrosion process is divided into three steps; the reaction conditions are: Step 1: voltage 8V, time 4h , the sample is pulled up and down at a speed of 160 times / min; step 2: the voltage is 4V, the time is 5h, the sample is pulled up and down at a speed of 160 times / min; step 3: the voltage is 1V, the time is 6h, the sample is pulled up and down at a speed of 150 times / min. After ultrasonic cleaning and heating and drying, a single crystal rare earth hexaboride single tip is obtained.

[0019] ...

Embodiment 3

[0021] The corrosion solution is hydrochloric acid: alcohol: deionized water=1:20:20 (volume ratio), wherein, the volume percentage concentration of hydrochloric acid is 5%, and the volume percentage concentration of alcohol is 95%, and then the single crystal rod is clamped in At the sample holder of the corrosion equipment, the sample is immersed in the corrosion solution, and placed in the stepping motor-assisted electrochemical corrosion equipment for electrochemical corrosion. The corrosion process is divided into three steps; the reaction conditions are: Step 1: voltage 8V, time 4h , the sample is pulled up and down at a speed of 160 times / min; step 2: the voltage is 4V, the time is 5h, the sample is pulled up and down at a speed of 160 times / min; step 3: the voltage is 1.5V, the time is 5h, the sample is pulled up and down at a speed of 120 times / min. After ultrasonic cleaning and heating and drying, a single crystal rare earth hexaboride single tip is obtained.

[0022...

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Abstract

The invention discloses a method for preparing a field emission single tip through stepping motor assisted electrochemical corrosion, and belongs to the technical field of cathode field emission. Themethod has the advantages that the monocrystal rare earth hexaboride field emission single tip is prepared through stepping motor assisted electrochemical impregnation and corrosion, and corrosion polarization overpotentials on corroded and non-corroded portions of a monocrystal rare earth hexaboride sample are enabled to have obvious differences through adjustment of the up-down movement rate anddisplacement of a stepping motor, the corrosion voltage and the corrosion time, so that stray corrosion in the manual infiltration process and the corrosion process of the sample and corrosion liquidduring single tip preparation based on electrochemical corrosion is effectively avoided, human factors affecting the single tip preparation are reduced, the uniformity and regularity of the single tip morphology and the preparation efficiency are improved, the cathode field emission performance of the single chip is enhanced, and the monocrystal rare earth hexaboride field emission single tip serving as an electron source has a wide application prospect in the field of vacuum electronic equipment such as scanning electron microscopes and electron beam lithography systems.

Description

technical field [0001] The invention belongs to the technical field of cathode field emission, and in particular relates to a method for preparing a single-crystal rare earth hexaboride field emission single-tip by adopting stepping motor-assisted electrochemical infiltration corrosion. Background technique [0002] Field emission cold cathodes have received extensive attention and rapid development in recent years. Compared with other emission cathodes, the most prominent advantages are: high emission current density, lower energy consumption, higher efficiency, faster emission response, and smaller cathode size . The single pointed field emission cathode has the advantages of simple structure, high stability, high emission current density and simple processing. Compared with field emission cathodes with other geometric structures, it is more widely used in the field of field emission. Traditional single-tip field emission cathodes mainly include molybdenum tip and silico...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J9/02
CPCH01J9/025
Inventor 张忻肖怡新刘洪亮张久兴
Owner BEIJING UNIV OF TECH