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Solar cell anaerobic annealing process

A technology of solar cells and annealing process, which is applied to circuits, photovoltaic power generation, electrical components, etc., and can solve problems such as increasing defects, reducing conversion efficiency, and increasing light-induced attenuation

Active Publication Date: 2019-03-05
TONGWEI SOLAR ENERGY CHENGDU CO LID
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Excessive oxygen content will increase defects in silicon wafers, reduce conversion efficiency and increase light-induced attenuation

Method used

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Embodiment Construction

[0023] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below in conjunction with specific embodiments.

[0024] The present invention provides an oxygen-free annealing process for solar cells, comprising the following steps:

[0025] A. Put the cells into the annealing furnace; push the filled cells into the furnace tube of the annealing furnace, and feed large nitrogen into the furnace tube with a flow rate of 1500ml / min-3500ml / min. Heat to 640-660°C. The purpose of introducing large amounts of nitrogen is to squeeze out the air in the furnace tube and reduce the oxygen content in the furnace tube as much as possible.

[0026] In order to ensure the output during the production process, the furnace is generally kept at a temperature of 600°C in the non-annealing state. This reduces the time required to increase the temperature (eg to 740°C).

[0027]...

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PUM

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Abstract

The invention discloses a solar cell anaerobic annealing process. The solar cell anaerobic annealing process comprises the following steps of A. putting a cell into an annealing furnace; B. raising internal temperature of a furnace tube of the annealing furnace to a first temperature, and vacuumizing to a first pressure; C. keeping the first temperature and the first pressure; D. lowering internaltemperature of the furnace tube of the annealing furnace to a second temperature; E. raising pressure in the furnace tube of the annealing furnace to normal pressure; and F. discharging.

Description

technical field [0001] The invention relates to an annealing process in the preparation process of crystalline silicon solar cells. Background technique [0002] A solar cell, also known as a photovoltaic cell, is a semiconductor device that converts the sun's light energy directly into electrical energy. Because it is a green product, does not cause environmental pollution, and is a renewable resource, solar cells are a new energy source with broad development prospects in today's energy shortage situation. [0003] The preparation of existing crystalline silicon solar cells includes processes such as texturing, diffusion, etching, annealing, PECVD, and screen printing. In the prior art, the diffusion of monocrystalline silicon solar cells is not uniform, and the surface concentration is relatively high. Moreover, single crystal silicon is prone to lattice distortion after being diffused at high temperature. Therefore, the annealing process is added after texturing, diff...

Claims

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Application Information

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IPC IPC(8): H01L31/18
CPCH01L31/1804Y02E10/547Y02P70/50
Inventor 张冠纶扈静谢耀辉
Owner TONGWEI SOLAR ENERGY CHENGDU CO LID
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