Hydrogen sensor and preparation method thereof

A sensor and hydrogen technology, applied in the field of high-sensitivity hydrogen sensors, can solve the problems of inconvenient hydrogen storage and use, non-continuous measurement, and limited electrode life, and achieve wide selectivity, scalability, strong resistance to electromagnetic interference, and measurement small error effect

Inactive Publication Date: 2019-04-02
JINAN UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At the same time, since the ignition point of hydrogen is 585°C, when the hydrogen content in the air is in the range of 4% to 75%, an explosion will occur when encountering an open flame, which brings great inconvenience to the storage and use of hydrogen
[0003] At present, the commonly used method for measuring hydrogen concentration is based on the detection technology of gas chromatography. This measurement method has large error

Method used

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  • Hydrogen sensor and preparation method thereof
  • Hydrogen sensor and preparation method thereof
  • Hydrogen sensor and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] Such as figure 2 As shown, a hydrogen sensor based on a chalcogenide soft glass optical microdisk cavity, including a microdisk cavity substrate and a 1 μm thick SiO2 layer prepared sequentially on the substrate from bottom to top 2 Protective layer, 1.36μm thick Ge 11.5 As 24 Se 64.5 Thin-film microdisk cavity, 250nm-thick metal palladium thin-film hydrogen absorption layer.

[0042] Ge 11.5 As 24 Se 64.5 The cavity of the film microdisk is uniform and flat, and has strong adhesion. The metallic palladium thin film is selectively deposited on the chalcogenide thin film to weaken the impact on light wave transmission when fully covered.

[0043]The substrate is a structure with a narrow top and a wide bottom, and the side wall is an inwardly concave curved surface, so as to maximize the suspended length of the chalcogenide soft glass microdisk cavity, so that the hydrogen absorption layer can be transferred to the corresponding shape on the chalcogenide glass. ...

Embodiment 2

[0055] Such as figure 2 As shown, a hydrogen sensor based on a chalcogenide soft glass optical microdisk cavity, including a microdisk cavity substrate and a 1 μm thick SiO 2 Thermal oxide protective layer, 1μm thick As 2 S 3 Thin-film microdisk cavity, 150nm-thick metal palladium thin-film hydrogen absorption layer.

[0056] As 2 S 3 The cavity of the film microdisk is uniform and flat, and has strong adhesion. The metallic palladium thin film is selectively deposited on the chalcogenide thin film to weaken the impact on light wave transmission when fully covered.

[0057] The substrate is a structure with a narrow top and a wide bottom, and the side wall is an inwardly concave curved surface, so as to maximize the suspended length of the chalcogenide soft glass microdisk cavity, so that the hydrogen absorption layer can be transferred to the corresponding shape on the chalcogenide glass. The more pronounced the variable, the higher the corresponding sensitivity.

[0...

Embodiment 3

[0068] Such as figure 2 As shown, a hydrogen sensor based on a chalcogenide soft glass optical microdisk cavity, including a microdisk cavity substrate and a 1 μm thick SiO2 layer prepared sequentially on the substrate from bottom to top 2 Thermal oxide protective layer, 1μm thick Ge 11.5 As 24 Se 64.5 Thin-film microdisk cavity, 180nm-thick metal palladium thin-film hydrogen absorption layer.

[0069] Ge 11.5 As 24 Se 64.5 The cavity of the film microdisk is uniform and flat, and has strong adhesion. The metallic palladium thin film is selectively deposited on the chalcogenide thin film to weaken the impact on light wave transmission when fully covered.

[0070] The substrate is a structure with a narrow top and a wide bottom, and the side wall is an inwardly concave curved surface, so as to maximize the suspended length of the chalcogenide soft glass microdisk cavity, so that the hydrogen absorbing layer can be transferred to the corresponding shape on the chalcogeni...

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Abstract

The invention discloses a preparation method of a hydrogen sensor. The method comprises the following steps: depositing a chalcogenide soft glass film on a substrate; preliminarily processing the chalcogenide soft glass film into a chalcogenide soft glass micro-cavity by adopting a photoetching and etching process; corroding a protective layer under the micro-cavity of the chalcogenide soft glass;selectively depositing a metal palladium film as a hydrogen absorbing layer; and processing the substrate to complete the preparation of the hydrogen sensor. The invention further discloses a hydrogen sensor. The sensor comprises a micro-cavity substrate, and a protective layer, a chalcogenide soft glass micro-cavity and a hydrogen absorbing layer which are sequentially prepared on the substratefrom bottom to top. According to the hydrogen sensor and the preparation method thereof, an echo wall mode optical micro-cavity is adopted as a basic sensing unit, and the sensor has the advantages oflow power consumption, strong electromagnetic interference resistance, good safety and high flexibility.

Description

technical field [0001] The invention relates to the technical field of gas concentration measurement, in particular to a high-sensitivity hydrogen sensor based on a chalcogenide soft glass optical whispering gallery mode microdisk cavity. Background technique [0002] Hydrogen is a colorless, odorless, flammable and explosive gas. The molecular weight of hydrogen is very small, and it is easy to leak during reproduction, storage, transportation and use, and hydrogen has a strong permeability. At the same time, since the ignition point of hydrogen is 585°C, when the hydrogen content in the air is in the range of 4% to 75%, an explosion will occur when encountering an open flame, which brings great inconvenience to the storage and use of hydrogen. [0003] At present, the commonly used method for measuring hydrogen concentration is based on the detection technology of gas chromatography. This measurement method has large errors, low sensitivity, complex operation, and cannot ...

Claims

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Application Information

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IPC IPC(8): G01N21/41
CPCG01N21/41
Inventor 万磊李朝晖陈振世刘伟平熊松松
Owner JINAN UNIVERSITY
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