Dual-light-source high-precision anti-interference large-working-distance self-collimating device and method
A high-precision, dual-light source technology, applied in the direction of optical devices, measuring devices, optics, etc., can solve the problems of unstable beam transmission, measuring distance not too far, wave front distortion, etc., to increase anti-interference ability and improve anti-interference ability Effect of interference ability and improvement of measurement accuracy
Active Publication Date: 2019-04-05
HARBIN INST OF TECH
7 Cites 7 Cited by
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The invention belongs to the technical field of precision measurement and the field of optical engineering, and particularly relates to a dual-light-source high-precision anti-interference large-working-distance self-collimating device and method. The device comprises a light source unit, a feedback imaging unit, a first transmission type collimating mirror, a sixth beam splitter mirror, a secondfilter, a combined mirror, an angle drift distance feedback measuring unit and a wavefront distortion feedback measuring unit. By means of the method, the angle drift distance feedback measuring unitand the wavefront distortion feedback measuring unit are additionally arranged, measurement and real-time compensation are carried out on the angle drift distance and wavefront distortion introduced by self-collimated beams due to air disturbance, influences of air disturbance on the self-collimated beams under the complex air environment and the long working distance are reduced, and the measurement and compensation accuracy is improved. By means of the device, under the same using environment and distance, the advantage of improving the measuring accuracy of the self-collimating device is achieved. In addition, the device adopts the structure of dual light sources, a light filter for correspondingly receiving the light beam wavelength is placed in front of a photoelectric detector, interference of the other light source and the external environment stray light on sensor detection is weakened, the signal-to-noise ratio of photoelectric sensor output signals is improved, and the measurement accuracy, the anti-interference ability and the stability of the laser self-collimating device are improved.
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