Dual-light-source high-precision anti-interference large-working-distance self-collimating device and method

Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering, and particularly relates to a dual-light-source high-precision anti-interference large-working-distance self-collimating device and method. The device comprises a light source unit, a feedback imaging unit, a first transmission type collimating mirror, a sixth beam splitter mirror, a secondfilter, a combined mirror, an angle drift distance feedback measuring unit and a wavefront distortion feedback measuring unit. By means of the method, the angle drift distance feedback measuring unitand the wavefront distortion feedback measuring unit are additionally arranged, measurement and real-time compensation are carried out on the angle drift distance and wavefront distortion introduced by self-collimated beams due to air disturbance, influences of air disturbance on the self-collimated beams under the complex air environment and the long working distance are reduced, and the measurement and compensation accuracy is improved. By means of the device, under the same using environment and distance, the advantage of improving the measuring accuracy of the self-collimating device is achieved. In addition, the device adopts the structure of dual light sources, a light filter for correspondingly receiving the light beam wavelength is placed in front of a photoelectric detector, interference of the other light source and the external environment stray light on sensor detection is weakened, the signal-to-noise ratio of photoelectric sensor output signals is improved, and the measurement accuracy, the anti-interference ability and the stability of the laser self-collimating device are improved.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, in particular to a dual-light source high-precision anti-interference large working distance self-collimation device and method. Background technique [0002] With the continuous improvement of the level of science and technology, processing and manufacturing presents a trend of high precision and large size, in which precise small-angle measurement is an important part. The instrument commonly used for precise small-angle measurement is a laser autocollimator with the principle of optical self-collimation as the core. important role. [0003] Laser autocollimator has the advantages of high resolution, high precision, long measurement distance, fast measurement speed, non-contact, convenient adjustment and movement, etc., and has a very wide range of applications in the above fields. [0004] In precision and ultra-precise positioning detectio...

AI Technical Summary

Problems solved by technology

[0007] First, the use environment of the laser autocollimator should not be too harsh, otherwise the long-distance transmission of the beam in the air will make the beam transmission unstable, making the measurement results unstable, and the autocollimator cannot be used in an environment with more complex air conditions. Realize stable measurement;

[0008] Second, the measurement distance between the target reflector and the laser autocollimator should not be too far, otherwise, due to the influence of air disturbance, the angular drift and wavefront distortion will occur during the beam transmission process, resulting in the autocollimator not being able to operate in relatively air conditions. High-precision measurement in complex environments

[0009] The above two problems make traditional autocollimators only able to achieve high-precision and high-stability measurements in a stable air environment and at short distances

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