Dual-light source high-precision anti-interference and large working distance autocollimation device and method based on absolute angle measurement

Abstract

The invention belongs to the field of precision measurement technology and optical engineering, and specifically relates to a dual-light source high-precision anti-interference and large working distance self-collimation device and method based on absolute angle measurement; the device consists of a light source unit, a first polarizer, a feedback imaging unit, A first transmissive collimating mirror, a combined reflector, a second polarizing beam splitter, an angular drift feedback measurement unit, and a wavefront distortion feedback measurement unit. In this method, the angular drift and wavefront distortion introduced by the air disturbance of the autocollimated beam are respectively measured and compensated in real time by adding the angular drift feedback measurement unit and the wavefront distortion feedback measurement unit, so as to reduce the loss of the self-collimated beam in complex air environment, Affected by air turbulence under long working distance, the accuracy of measurement and compensation is improved. The structure of dual light sources is adopted to reduce the interference of the other light source and the stray light of the external environment on the sensor detection, improve the signal-to-noise ratio, and improve the anti-interference ability and stability of the laser autocollimator. In addition, the device adds a horizontal reference measurement optical path, which can realize the measurement of the absolute yaw angle and pitch angle of the laser autocollimator and the measured surface relative to the horizontal reference.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, in particular to a dual light source high-precision anti-interference large working distance self-collimation device and method based on absolute angle measurement. Background technique [0002] With the continuous improvement of the level of science and technology, processing and manufacturing presents a trend of high precision and large size, in which precise small-angle measurement is an important part. The instrument commonly used for precise small-angle measurement is a laser autocollimator with the principle of optical self-collimation as the core. important role. [0003] Laser autocollimator has the advantages of high resolution, high precision, long measurement distance, fast measurement speed, non-contact, convenient adjustment and movement, etc., and has a very wide range of applications in the above fields. [0004] In precision an...

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Problems solved by technology

[0010] Aiming at the two problems existing in the traditional autocollimator, the present invention discloses a dual light source high-precision anti-interference and large working distance autocollimation device and method based on absolute angle measurement. Compared with the traditional autocollimator, it can Measure under more complex air environment conditions, improve the measurement accuracy, anti-interference ability and stability of the laser autocollimator during the measurement process; at the same time, the device uses the horizontal liquid level as the reference to realize the alignment between the autocollimation device and the measured target The absolute angle measurement of

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