Laser evaporation multi-cavity nano-powder preparation device

A laser evaporation, multi-cavity technology, applied in the direction of nano-carbon, carbon nanotubes, inorganic chemistry, etc., can solve the problems of insufficient continuity, low production efficiency, and increased cost, so as to reduce the time of vacuuming and avoid large-scale production stoppage , to avoid the effect of device deactivation

Pending Publication Date: 2019-05-17
DALIAN UNIV OF TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0005] At present, in the single-chamber powder preparation equipment and process, most of the time is spent on vacuuming and vacuum maintenance during the cycle of vacuum extraction, powder generation and processing, and vacuum maintenance. It takes 3-4 hours for the equipment to be vacuumed, and the time for powder preparation is less than 0.5 hours. The time for vacuum extraction and vacuum maintenance accounts for 50%-70%, while the actual powder production time is 15-20%. In other words, the production efficiency is low, and at the same time, due to the vacuum extraction and vacuum maintenance and repeated repetition of this process, a large amount of energy will be consumed, which will greatly increase the cost
[0006] 2. Low purity and cross-contamination
[0007] For the single-chamber powder preparation equipment and process, after the nano-powder preparation of one material is prepared, if the powder of other materials is prepared, there will be powder residues in copper crucibles, equipment connections and other places that cannot be removed, resulting in When preparing the next powder, there is at least two kinds of mutual contamination between the powders, thereby reducing the purity of the nano-powders
[0008] 3. Unable to realize continuous production in the true sense
[0009] The current single-chamber powder preparation equipment and process are limited by the size of the anode material, and there will be insufficient continuity in the continuous feeding and supply process of the material
At the same time, since the powder collection process requires repeated vacuuming and vacuuming processes, the operation time is relatively high. This method cannot achieve continuous production on the premise of ensuring product quality in large-scale industrial production. In the near future phase out

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  • Laser evaporation multi-cavity nano-powder preparation device
  • Laser evaporation multi-cavity nano-powder preparation device

Examples

Experimental program
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Effect test

Embodiment 1

[0038] Such as Figure 1-2 As shown, the laser evaporation multi-cavity nano-powder preparation device is provided with at least two main chamber powder generation units; each main chamber powder generation unit is connected to the vacuum main pipeline 13 through respective vacuum branch pipelines 14, and the vacuum main chamber The pipeline is connected to the vacuum pump group system 17; each main chamber powder generating unit is connected to the main exhaust pipe 2 through respective exhaust branch pipes 4, and each main chamber powder generating unit is respectively connected to Intake main pipeline 3; each main chamber powder generating unit is connected to the control system 1 through their respective feeding control signal lines; the main chamber powder generating unit includes a main chamber 9, a laser device 6, and the main chamber The top of the chamber is provided with a laser device, and the bottom of the main chamber is provided with a collection chamber 18; the ...

Embodiment 2

[0046] Utilize the device described in embodiment 1 to realize the continuous production method of laser evaporation multi-cavity metal nanopowder, comprising the following steps:

[0047] (1) Place the target: install a single metal or metal alloy target with the same composition or different composition on the target holder of each independent cavity as the anode, and use a metal with a melting point higher than 3000°C as the cathode. Gallium arsenide glass with a thickness of 3-5mm is sealed and installed at the opening on the inner wall of the upper cavity, and the gallium arsenide glass is cooled;

[0048] (2) Vacuuming: Close the hatches of each independent cavity, open the vacuum valves of each independent cavity, and use a mechanical pump to vacuumize all the cavities for no more than 10 -1 Pa, and then use the molecular pump to vacuum not higher than 10 -4 Pa, close the vacuum valves of each independent cavity;

[0049] (3) Filling with working gas: open the intake ...

Embodiment 3

[0057] Using the device described in Example 1 to realize the steps of the continuous production method of laser evaporation multi-cavity carbon nanopowder is the same as in Example 1, the difference is:

[0058] In the step (1), the anode target material is a mixture of different types of carbon and a catalyst, the carbon material is graphite, carbon black or activated carbon, the catalyst is a transition metal or yttrium oxide, and when the catalyst is a transition metal, the carbon nanotube obtained is Multi-walled carbon nanotubes, when the catalyst is yttrium oxide, the obtained carbon nanotubes are single-walled carbon nanotubes, and the atomic ratio of carbon atoms to metal atoms in the carbon material and catalyst mixture is 80-100;

[0059] The specific steps of carbon nano powder collection in the step (7) are in-situ carbon nano powder collection: after the consumption of any one of the anode targets is completed, close the arc in the cavity, fill the cavity with arg...

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Abstract

The invention relates to the technical field of nano-powder preparation, in particular to a laser evaporation multi-cavity nano-powder preparation device. At least two main chamber powder generating units are arranged; the main chamber powder generating units are connected to a vacuum main pipeline separately through vacuum branch pipelines, and the vacuum branch pipelines are connected to a vacuum pump group system; the main chamber powder generating units are connected to an exhaust main pipeline separately through exhaust branch pipelines, and the main chamber powder generating units are connected to an air inlet main pipeline through air inlet branch pipelines; and the main chamber powder generating units are connected to a laser generator and a control system separately through lasercontrol signal lines and feeding control signal lines. According to the laser evaporation multi-cavity nano-powder preparation device, mutual pollution in the powder preparation process is avoided, and the purity of the powder is improved; simultaneous preparation of various powder with different components is realized; continuous production is realized; and the production efficiency is greatly improved, and the cost is reduced.

Description

technical field [0001] The invention relates to the technical field of nano powder preparation, in particular to a laser evaporation multi-cavity nano powder preparation device. Background technique [0002] Laser is an effective heat source for preparing nanoparticles. At present, this method has initially achieved mass production. There are still many technical problems in production, mainly in how to prepare nano powder with high efficiency, low cost, high purity, pollution-free and continuous. [0003] Existing nanopowder preparation equipment is mainly aimed at the generation, grading, trapping and processing of nanopowder in a single chamber, that is, a single generation chamber. This single chamber powder preparation equipment has the following defects: [0004] 1. Low production efficiency and high cost [0005] At present, in the single-chamber powder preparation equipment and process, most of the time is spent on vacuuming and vacuum maintenance during the cycle ...

Claims

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Application Information

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IPC IPC(8): B22F9/12C01B32/162C01B32/159
CPCY02P10/25
Inventor 黄昊黄子岸吴爱民
Owner DALIAN UNIV OF TECH
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