Silicon carbide high temperature vibration sensor with high sensitivity, high frequency response and anti-overload

Abstract

The invention discloses a silicon carbide high temperature vibration sensor with high sensitivity, high frequency response, and anti-overload. The silicon carbide high temperature vibration sensor comprises a silicon carbide chip, a silicon carbide bonding sheet, an insulation layer, a packaging shell, and a kovar pin; the silicon carbide chip comprises a supporting sheet body, a cantilever beam,and a mass block; the supporting sheet body and the silicon carbide bonding sheet form a bonding body; the mass block and the cantilever beam are arranged insidea cavity of the bondingbody, and the cantilever beam is provided with a chip circuit; and the kovar pin extends into a bonding material along through holes arranged on the package shell, the insulation layer and the silicon carbide bondingsheet, and is connected with the chip circuit. The high temperature vibration sensorhas the characteristics of high sensitivity, high frequency response and anti-overload, and the accurate and timelymeasurement of vibration signals in the high temperature environment can be realized.

Description

technical field [0001] The invention relates to the technical field of vibration sensors, in particular to a silicon carbide high temperature vibration sensor with high sensitivity, high frequency response and anti-overload. Background technique [0002] Vibration measurement in high temperature environment is widely used in aerospace, petrochemical, automobile industry and other fields, such as vibration measurement of aero-engine combustion chamber, vibration monitoring of nuclear reactor equipment, oil drilling safety monitoring, etc. At present, vibration sensors mainly include piezoresistive, capacitive, resonant, etc., but due to the working principle of the sensor, material characteristics, and packaging technology, the temperature resistance of the sensor is limited, and the operating temperature of the sensor is generally low. Meet the requirements for normal operation in high temperature environments above 600°C; in addition, the contradiction between sensor sensit...

AI Technical Summary

Problems solved by technology

At present, vibration sensors mainly include piezoresistive, capacitive, resonant, etc., but due to the working principle of the sensor, material characteristics, and packaging technology, the temperature resistance of the sensor is limited, and the operating temperature of the sensor is generally low. Meet the requirements for normal operation in high temperature environments above 600°C; in addition, the contradiction between sensor sensitivity and stiffness has always been a key issue limiting the performance improvement of piezoresistive vibration sensors; and in many high-temperature application environments mentioned above, The sensor must have a good anti-overload ability to effectively resist unexpected high-frequency, high-energy impacts and ensure that it is not damaged

Images